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Title
Japanese: 
English:Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis 
Author
Japanese: 何文涛, 清田哲司, 土居謙太, 山下雄也, 菊地航行, 渡邊修平, 櫻井彩貴, 叶宇晨, 島谷和希, 根津篤, 赤塚洋.  
English: He Wentao, Tetsuji Kiyota, Kenta Doi, Yuya Yamashita, Wataru Kikuchi, Shuhei Watanabe, Ayaki Sakurai, Yuchen Ye, Kazuki Shimatani, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Bull. American Phys. Soc. 
Volume, Number, Page        
Published date Oct. 13, 2025 
Publisher
Japanese: 
English:Americal Physical Society 
Conference name
Japanese: 
English:The 78th Annual Gaseous Electronics Conference (GEC2025) 
Conference site
Japanese:ソウル 
English:Seoul 
Official URL https://schedule.aps.org/gec/2025/events/DT4/35
 
Abstract Optical Emission Spectroscopy (OES) combined with tomographic analysis was used to measure spatial distributions of plasma radiance in oxygen inductively coupled plasma (ICP). From the reconstructed radiance profiles, the dissociation degree of oxygen molecules was estimated using actinometry. These results were then applied to a Collisional-Radiative Model (CRM) to calculate spatial distributions of electron temperature and electron density. The combined use of tomographic OES, actinometric analysis, and CRM enabled a detailed, spatially resolved characterization of oxygen plasma parameters under ICP power conditions of 400-800 W and pressure conditions of 1-10 Pa.

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