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Title
Japanese: 
English:Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects 
Author
Japanese: 叶宇晨, 土居謙太, 清田哲司, 菊地航行, 島谷和希, 羽生陽向, 何文涛, 櫻井彩貴, 山下雄也, 根津篤, 赤塚洋.  
English: Yuchen Ye, Kenta Doi, Tetsuji Kiyota, Wataru Kikuchi, Kazuki Shimatani, Hinata Hanyu, Wentao He, Ayaki Sakurai, Yuya Yamashita, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Bull. American Phys. Soc. 
Volume, Number, Page        
Published date Oct. 13, 2025 
Publisher
Japanese: 
English:Americal Physical Society 
Conference name
Japanese: 
English:The 78th Annual Gaseous Electronics Conference (GEC2025) 
Conference site
Japanese:ソウル 
English:Seoul 
Official URL https://schedule.aps.org/gec/2025/events/DW5/12
 
Abstract Two-dimensional horizontal distributions of electron temperature and density in argon inductively coupled plasma (ICP) with an applied radio frequency bias were obtained using optical emission spectroscopy (OES) combined with a spectral tomography algorithm. Additionally, Langmuir probe measurements were conducted along the diameter of the chamber to determine the spatial distributions of electron and ion densities. The results revealed a significant deviation from the assumption of quasi-neutrality near the chamber center at a height of 12 mm above the substrate. Based on this observation, the Ar collisional-radiative model results obtained from OES were recalculated under the conditions of 1 Pa discharge pressure, 600 W ICP power, and 100 W bias power, with modifications to account for the observed deviation from quasi-neutrality.

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