Spatially-Resolved Measurements Of Electron Temperature And Density Of Oxygen ICP By Tomographic Emission Spectroscopy

Publication Information

Title

Japanese:
English:	Spatially-Resolved Measurements Of Electron Temperature And Density Of Oxygen ICP By Tomographic Emission Spectroscopy

Author

Japanese:	何文涛, 清田哲司, 土居謙太, 小関智光, 根津篤, 赤塚洋.
English:	Wentao He, Tetsuji Kiyota, Kenta Doi, Tomomitsu Ozeki, Atsusi Nezu, Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Program Book of AEPSE2025

Volume, Number, Page

p. 81

Published date

Nov. 2, 2025

Publisher

Japanese:
English:	International Scientific Committee ofAEPSE2025

Conference name

Japanese:
English:	The 14th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2025)

Conference site

Japanese:	プーケット
English:	Phuket

Official URL