"A. Murakami,H-Y. Go,N. Wakiya,T. Kiguchi,Cross Jeffrey,O. Sakurai,K. Shinozaki","Evaluation and Control of Residual Stress in Fluorite-Type-Oxide Thin Films Deposited by PLD","22nd Fall Meeting of The Ceramic Society of Japan","22nd Fall Meeting of The Ceramic Society of Japan",,,"No. 1PE03","pp. 136",2009,Sept. "A. Murakami,H.-Y. Go,N. Wakiya,T. Kiguchi,Jeffrey Cross,O. Sakurai,K. Shinozaki","Evaluation and Control of Residual Stress in Epitaxial Fluorite-Type-Oxide Thin Films Deposited on Si Substrates by PLD","The 3rd International Conference on Science and Technology for Advanced Ceramics (STAC3).","The 3rd International Conference on Science and Technology for Advanced Ceramics (STAC3).",,,"No. 16pP045",,2009,June "Akihiro Murakami,Naoki Wakiya,Tomohiko Yoshioka,Junzo Tanaka,KAZUO SHINOZAKI","Si基板上に製膜した(001)エピタキシャルYSZ薄膜の残留応力の測定と制御","Annual Meeting of The Ceramic Society of Japan, 2009","Annual Meeting of The Ceramic Society of Japan, 2009",,,"No. 3C17","pp. 266",2009,Mar.