"Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","3軸Au錘MEMS加速度センサにおける検出電極構造の検討","令和元年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 67-72",2019,July
"Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","3軸Au錘MEMS加速度センサにおける平行平板型電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Takasi Itikawa,Hirofumi Niijima,Sayaka Koga,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Au単一錘平行平板型3軸MEMS加速度センサの検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"Hirofumi Niijima,Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","高感度MEMS加速度センサのBrownian Noise評価に関する検討","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Hirofumi Niijima,Shouta Otobe,Motohiro Takayasu,Daisuke Yamane,Hiroyuki Ito,Teruaki Safu,Toshifumi Konishi,Shiro Dosho,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass","平成30年電気学会全国大会",,,,,,2018,Mar.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  01am2-PLN-8",2017,Oct.