"JoonHyun Kang,Keita Inoue,Yuki Atsumi,Nobuhiko Nishiyama,SHIGEHISA ARAI","Loss Measurement of Multiple Layer a-Si Waveguides","SSDM",,," Tokyo"," D-8-2",,2010,Aug. "Yuki Atsumi,Keita Inoue,Nobuhiko Nishiyama,Shigehisa Arai","Athermal Wavelength Characteristics of Si Slot Ring Resonator Embedded with Benzocyclobutene for Optoelectronic Integrated Circuits",,"Japanese Journal of Applied Physics","The Japan Society of Applied Physics","Vol. 49",,"pp. 050206-1-3",2010,May "渥美裕樹,井上敬太,西山伸彦,荒井滋久","BCB埋め込みSiスロット導波路の光伝搬損失の評価","第57回応用物理学関係連合講演会",,"応用物理学会"," 17p"," P3"," 10",2010,Mar. "井上敬太,渥美裕樹,西山伸彦,田村茂雄,荒井滋久","SOI基板上多層a-Si細線導波路の伝搬特性の評価",,"第57回応用物理学関係連合講演会",,"Vol. 神奈川","No. 17p-P3-7",,2010,Mar. "Yuuki Atsumi,Keita Inoue,Nobuhiko Nishiyama,SHIGEHISA ARAI","Athermal Wavelength Operation of Si-Slot Ring Resonator Embedded with Benzocyclobutene","第12回シリコン・フォトニクス研究会","第12回シリコン・フォトニクス研究会 講演予稿集","SIPH",,,,2009,Nov. "渥美裕樹,井上敬太,西山伸彦,荒井滋久","BCB埋め込みSiスロット導波路構造を用いた温度無依存波長フィルタ","電子情報通信学会技術研究報告",,"電子デバイス研究会",,,,2009,Sept. "Yuki Atsumi,Nobuhiko Nishiyama,Haruki Enomoto,Keita Inoue,SHIGEHISA ARAI","Athermal Wavelength Property of Si-Slot Ring Resonator Embedded with Benzocyclobutene","The 6th International Conference on Group ? Photonics",,"IEEE LEOS",,,,2009,July "Haruki ENOMOTO,Keita INOUE,Tadashi OKUMURA,Hanh DUC NGUYEN,Nobuhiko NISHIYAMA,Yuki ATSUMI,Simon KONDO,Shigehisa ARAI","Properties of High index-Contrast Wired GaInAsP Waveguides with Benzocyclobutene on Si Substrate",,"The 21th International Conference on Indium Phosphide and Related Materials (IPRM2009)",,"Vol. Newport Beach, California","No. ThA1. 4",,2009,May "渥美裕樹,西山伸彦,榎本晴基,井上敬太,荒井滋久","BCB埋め込みSiスロット導波路による波長フィルタの温度無依存化の検討","第56回春季応用物理学会学術講演会","第56回春季応用物理学会学術講演会予稿集","応用物理学会",,"No. 3","p. 1230",2009,Apr. "榎本晴基,井上敬太,奥村忠嗣,グェン・ドゥック・ハン,西山伸彦,渥美裕樹,近藤志文,荒井滋久","Si上BCB貼付型強光閉じ込めGaInAsP細線導波路の特性","第56回春季応用物理学会学術講演会","第56回春季応用物理学会学術講演会予稿集",,"Vol. 3","No. 2P-A-8","p. 1242",2009,Mar. "Keita Inoue,Dhanorm Plumwongrot,Nobuhiko Nishiyama,Shinichi Sakamoto,Haruki Enomoto,Shigeo Tamura,Takeo Maruyama,Shigehisa Arai","Loss Reduction of Si Wire Waveguide Fabricated by Edge-Enhancement Writing for Electron Beam Lithography and Reactive Ion Etching Using Double Layered Resist Mask with C60",,"Jpn. J. Appl. Phys.",,"vol. 48","no. 3","p. 030208",2009,Mar. "Keita Inoue,Dhanorm Plumuwongrot,Nobuhiko Nishiyama,Shinichi Sakamoto,Haruki Enomoto,Shigeo Tamura,Takeo Maruyama,Shigehisa Arai","Loss Reduction of SiWireWaveguide on SOI Substrate Prepared by Parallel Plate RIE using Double Layered Resist Mask with C60","The IEEE Nanotechnology Materials and Devices Conference 2008","IEEE NMDC2008",,,,,2008,Oct. "Keita Inoue,Nobuhiko Nishiyama,Haruki Enomoto,Shigeo tamura,Takeo Maruyama,Shigehisa Arai","Evaluation of Si Wire Waveguide Fabricated by Parallel Plate RIE Process using Double Layered EB Resist Containing C60","iNOW 2008","Digest of iNOW2008",,,"No. 3-P24",,2008,Aug. "Haruki Enomoto,Hai Duc Nguyen,Keita Inoue,Shinichi Sakamoto,Tadashi Okumura,Nobuhiko Nishiyama,Shimon Kondo,Shigehisa Arai","Comparison of Wafer Bonding Methods of Membrane GaInAsP WiredWaveguides on Si Substrate","2008 International Nano-Optoelectronics Workshop","2008 International Nano-Optoelectronics Workshop",,," session3-P27",,2008,Aug. "井上敬太,プルームウォンロート・タノーム,西山伸彦,阪本真一,榎本晴基,田村茂雄,丸山武男,荒井滋久","C60含有と非含有EBレジストZEPの重ね塗りによるSi導波路ドライエッチング形状の向上","第55回応用物理学関係連合講演会","第55回応用物理学関係連合講演会","応用物理学会","Vol. 千葉","No. 29p-ZG-15",,2008,Mar.