"Hisashi Takahata,Tomoyuki Kurioka,Torauto Yamada,Chihaya Mukaide,Katsuyuki Machida,Gen Hikosaka,Chun-Yi Chen,Tso-Fu Mark Chang,Yoshihiro Miyake,Hiroyuki Ito,Masato Sone","Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications","The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken)",,,,,,2026,Sept.
"高畑 寿志,栗岡 智行,彦坂 元,山田 虎人,向出 千隼,町田 克之,Chun-Yi Chen,Tso-Fu Mark Chang,三宅 美博,伊藤 浩之,曽根 正人","高感度静電容量型 MEMS 加速度センサのための九十九折ばね解析モデルの提案","第17 回集積化ＭＥＭＳ技術研究ワークショップ",,,,,,2026,July
"Hisashi Takahata,Tomoyuki Kurioka,Torauto Yamada,Chihaya Mukaide,Katsuyuki Machida,Chang Tso-Fu Mark,Chen Chun-Yi,Yoshihiro Miyake,Hiroyuki Ito,Masato Sone","Analytical Modeling of Serpentine Spring for Gold Proof-mass Single-axis MEMS Accelerometer","APCOT 2026","APCOT 2026",,,,,2026,June
"Torauto Yamada,Chihaya Mukaide,Hisashi Takahata,Tomoyuki Kurioka,Katsuyuki Machida,Tso-Fu Mark Chang,Yoshihiro Miyake,Masato Sone,Hiroyuki Ito","A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures","IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems","IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems",,,,,2026,May
"高畑 寿志,栗岡 智行,山田 虎人,向出 千隼,町田 克之,Chen Chun-Yi,Chang Tso-Fu Mark,三宅 美博,伊藤 浩之,曽根 正人","Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価","第73回応用物理学会春季学術講演会","第73回応用物理学会春季学術講演会",,,,,2026,Mar.
"高畑 寿志,栗岡 智行,山田 虎人,町田 克之,Tso-Fu Mark Chang,三宅 美博,伊藤 浩之,曽根 正人","Ti/Auで形成した九十九折ばねにおけるTi膜のばね形状への影響に関する検討","第17回集積化MEMSシンポジウム",,,,,,2025,Nov.