"Takumi Akiyama,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers ?",,"Micro and Nano Engineering",,"Vol. 21",,"p. 100226",2023,Sept.
"Takumi Akiyama,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"H? ‘ρŠC,CHIENYu-An,Chun-Yi Chen,Tso-Fu Chang,ˆΙ“‘_”V,’¬?Ž”V,ŽO‘ξ”ό”Ž,‘]ͺ³?","MEMSƒfƒoƒCƒX‚Φ‚Μ‰ž?‚ΙŒό‚―‚½?ƒjƒbƒPƒ‹‡?‚Μ”χ?‹@ŠB“I“Α« ‚Μ•]‰Ώ","2022”N‰ž?•¨—Šw‰οt‹Gu‰‰‰ο",,,,,,2022,Mar.
"Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.