"Tso-Fu Mark Chang,Chun-Yi Chen,Yota Ishizuka,Minami Teranishi,Takuma Suzuki,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 2",,"pp. 23-48",2019,Feb.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices",,"Microelectronic Engineering",,"Vol. 187-188",,"pp. 105-109",2018,Apr.
"山根 大輔,小西 敏文,佐布 晃昭,橘 航一朗,寺西 美波,陳 君怡,Tso-Fu Mark Chang,曽根 正人,町田 克之,益 一哉","積層メタルMEMS慣性センサの長期振動特性評価","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"山根 大輔,小西 敏文,佐布 晃昭,橘 航一朗,寺西 美波,陳 君怡,Tso-Fu Mark Chang,曽根 正人,町田 克之,益 一哉","金めっきで形成したMEMS加速度センサの長期振動特性に関する検討","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY",,"Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","IEEE Conference Publications",,,"pp. 2187 - 2190",2017,Aug.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology","The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)",,,,,"pp. 2187-2190",2017,June
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices","21th International Conference on Solid State Ionics",,,,,,2017,June
"山根 大輔,小西 敏文,佐布 晃昭,中島 英亮,寺西 美波,陳 君怡,Chang Tso-Fu Mark,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-14",2017,Mar.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hideaki Nakajima,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu","Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices","29th International Microprocesses and Nanotechnology Conference (MNC 2016)",,,,,"pp. 10D-5-1",2016,Nov.
"寺西美波,Chang Tso-Fu Mark,Chen Chun-Yi,山根大輔,益一哉,曽根正人,小西敏文,町田克之,年吉洋","電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers",,"Microelectronics Engineering",,"Vol. 153",,"pp. 90-93",2016,Apr.
"寺西 美波,TSO-FU MARK CHANG,陳 君怡,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","電解金めっきで作製したTi/Au微小カンチレバーの構造安定性","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices","SSDM2015, 2015 International Conference on Solid State Devises and Materials","SSDM2015, 2015 International Conference on Solid State Devises and Materials",,,,"pp. 52-53",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","25th Advanced Metallization Conference Asian Session (ADMETAplus2015)",,,,,,2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","AMC2015, Advanced Metallization Conference","AMC2015",,,,,2015,Sept.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers","MNE2015, The 41th International Conference on Micro and Nano Engineering","MNE2015, The 41th International Conference on Micro and Nano Engineering",,,,"pp. Wed-C-p81",2015,Sept.
"寺西美波,Tso-Fu Mark Chang,小西敏文,松島隆明,町田克之,年吉 洋,山根大輔,伊藤浩之,益 一哉,曽根正人","電解金めっきで作製したMEMSデバイスにおける動作構造安定性","応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ",,,,,"p. 7",2015,July
"寺西美波,Chang Tso-Fu Mark,山根大輔,小西敏文,松島隆明,伊藤浩之,年吉 洋,町田克之,益 一哉,曽根正人","電解金めっきで作製した微小カンチレバーの形状安定性評価","平成27年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 15-18",2015,July
"Minami Teranishi,Tso-Fu Mark Chang,Toshifumi Konishi,Masaki Yano,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Kazuya Masu,Tatsuo Sato,Masato Sone","Stability of Movable Structure Formed by Au Electroplating for MEMS Devices","ICMAT2015 & IUMRS-ICA2015,","ICMAT2015 & IUMRS-ICA2015,",,,,,2015,June