"Takuya Kurihara,Michitaka Sato,Shinsuke Mori,Masaaki Suzuki","Characterization of magnetic thin films etch process in N2 plasmas","21th International Symposium on Plasma Chemistry (ISPC21)","Proceedings of 21th International Symposium on Plasma Chemistry (ISPC21)",,,,"  ID394",2013,Aug.