"Akihiko Sugihara,Tadashi Ishida","Microfluidic Liquid Cell with Silicon Nitride Super-Thin Membrane for Electron Microscopy of Samples in Liquid",,"Biosensors",,"Vol. 12",," 1138",2022,Dec. "™Œ΄ »•F,Ξ“c ’‰","‰t’†ƒiƒmƒoƒCƒIŽŽ—Ώ‚Μ“dŽqŒ°”χ‹ΎŠΟŽ@‚Μ‚½‚ί‚Μ’΄”–“dŽqό“§‰ί–Œ‚π—L‚·‚ιMEMS‰t‘ΜƒZƒ‹‚ΜŠJ”­","‘ζ37‰ρuƒZƒ“ƒTEƒ}ƒCƒNƒƒ}ƒVƒ“‚Ζ‰ž—pƒVƒXƒeƒ€vƒVƒ“ƒ|ƒWƒEƒ€",,,,,,2020,Oct.