"T. Muto,Q. Zhu,J. Yamada,N. Kishi,M. Watanabe,E. Hotta","Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method","25th International Microprocesses and Nanotechnology Conference (MNC 2012)",,,,,,2012,Oct. "Zhu Qiushi,Takahiro Muto,Junzaburo Yamada,Nozomu Kishi,Masato watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Estimation of electron temperature and density of the decay plasma in a LADPP EUV source","Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology","The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology","IEE Japan",,,"pp. 15-20",2011,Dec. "武藤敬宏,朱 秋石,渡辺正人,堀田栄喜","レーザアブレーションスズプラズマの電子密度の時間空間分布","電気学会研究会資料, プラズマ/パルスパワー合同研究会","電気学会研究会資料, プラズマ/パルスパワー合同研究会","電気学会",,,"pp. 1-4",2011,Dec. "Qiushi Zhu,Takahiro Muto,Junzaburo Yamada,Nozomu Kishi,Masato Watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method",,"J. Appl. Phys.","American Insitute of Phyics","Vol. 110",,,2011,Dec. "武藤敬宏,Qiushi Zhu,渡辺正人,堀田栄喜","レーザアブレーションプラズマの電子密度測定","平成23年電気学会基礎・材料・共通部門大会","平成23年電気学会基礎・材料・共通部門大会","電気学会"," CD",,,2011,Sept.