"Takuya Kurihara,Michitaka Sato,Shinsuke Mori,Masaaki Suzuki","Characterization of magnetic thin films etch process in N2 plasmas","21th International Symposium on Plasma Chemistry (ISPC21)","Proceedings of 21th International Symposium on Plasma Chemistry (ISPC21)",,,,"  ID394",2013,Aug.
"佐藤 道貴,森 伸介,鈴木 正昭","強磁性金属のエッチング選択性に及ぼす放電条件の影響","化学工学会第77年会","化学工学会第77年会研究発表講演要旨集",,,,"  D203",2012,Mar.