"Jun Kanehara,Yusuke Takei,Youhei Miyata,Hiroshi Nohira,Y. Izumi,TAKAYUKI MURO,–ุ‰บ–L•F,ƒp[ƒ‹ƒnƒbƒgƒAƒwƒƒg,Kuniyuki KAKUSHIMA,KAZUO TSUTSUI,takeo hattori,HIROSHI IWAI","Depth Profiling of As with Various Chemical Bonding States Doped in Si Shallow Junction by Using Soft X-ray Photoelectron Spectroscopy","G-COE PICE International Symposium and IEEE EDS Minicolloquium on Advanced Hybrid Nano Devices: Prospects by Worldfs Leading Scientists",,,,,,2013, "•ˆไ —T‰๎,ย–ุ H‘พ,’ท‹ด G","‰ผ‘zŠย‹ซ‚ษ‚จ‚ฏ‚้”๑„‘ฬ•จ‘ฬ‚ฬ“ฎ์ถฌ‚ษŠึ‚ท‚้Œค‹†","‰ๆ‘œ“dŽqŠw‰๏‘ๆ255‰๑Œค‹†‰๏","‰ๆ‘œ“dŽqŠw‰๏Œค‹†‰๏—\eW",,,,"pp. 79-83",2011,Mar.