"Shunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Tenneti Devi Srujana,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Investigation of Effects of Applied Voltage on Effective Youngfs modulus of Ti/Au Multi-Layered Micro-Cantileversh New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,2024,Oct. "Syunkai Watanabe,Shunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Tenneti Devi Srujana,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Applied Voltage on Effective Youngfs Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Youngfs Modulus of Ti/Au Multi-Layered Micro-Cantilevers ?",,"Micro and Nano Engineering",,"Vol. 29",,"p. 100249",2024,Mar. "Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Youngfs Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2023","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept. "“nη³ tŠC,Chen Chun-Yi,ŒI‰ͺ ’qs,Chang Tso-Fu Mark,‘吼 “N,Parthojit Chakraborty,’¬“c Ž”V,ˆΙ“‘ _”V,ŽO‘ξ ”ό”Ž,‘]ͺ ³l","Ti/Au ‘½‘wƒJƒ“ƒ`ƒŒƒo[‚ΜŽΐŒψƒ„ƒ“ƒO—¦‚Ι‚¨‚―‚ι\‘’ˆφŽq‚ΜŒ€‹†","‘ζ70‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο","‘ζ70‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο",,,,"p. 16a-B410-4",2023,Mar.