"Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "宮井 良介,栗岡 智行,Chun-Yi Chen,Tso-Fu Mark Chang,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価","第71回応用物理学会春季学術講演会","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-1",2024,Mar. "Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers",,"Micro and Nano Engineering",,"Vol. 23",,"p. 100244",2024,Mar. "Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept. "宮井 良介,栗岡 智行,Chun-Yi Chen,Tso-Fu Mark Chang,大西 哲,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-5",2023,Mar.