"E. Hotta,Y. Sakai,Y. Hayashi,G. Niimi,B. Huang,Q. Zhu,I. Song,M. Watanabe","Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma","Int. Conf. on Optical and Photonic Engineering (icOPEN2015)","Proc. of SPIE","SPIE","Vol. 9524",,"pp. 9524U1 - 8",2015,Aug. "B.Huang,T.Tomizuka,B.Xie,Y.Sakai,Q.Zhu,I.Song,A.Okino,F.Xiao,M.Watanabe,E.Hotta","Simulation and mitigation of the magneto-Rayleigh-Taylor instabilities in Z-pinch gas discharge extreme ultraviolet plasma radiation sources",,"Physics of Plasmas","AIP Publishing LLC","Vol. 20",,,2013,Nov. "Y. Sakai,J. Rosenzweig,H. Kumai,Y. Nakanishi,Y. Ishizuka,S. Takahashi,T. Komatsu,Y. Xiao,H. Bin,Z. Qiushi,Y. Hayashi,I. Song,T. Kawamura,M. Watanabe,E. Hotta","Observation of emission process in hydrogen-like nitrogen Z-pinch discharge with time integrated soft X-ray spectrum pinhole image",,"Physics of Plasmas","American Institute of Physics","Vol. 20",,,2013,Feb. "Yusuke Sakai,Shunsuke Takahashi,Takanori Komatsu,Inho Song,Masato Watanabe,Eiki Hotta","Highly efficient pulsed power supply system with a two-stage LC generator and a step-up transformer for fast capillary discharge soft x-ray laser at shorter wavelength",,"Review of Scientific Instruments","American Instiitute of Physics","Vol. 81"," 013303","pp. 1-3",2010,Jan. "Yusuke Sakai,Takanori Komatsu,Yifan Xiao,INHO SONG,Gohta Niimi,MASATO WATANABE,AKITOSHI OKINO,EIKI HOTTA","Soft X-ray Radiation from Nitrogen Z-pinch Plasma Produced by Capillary Discahrge",,"IEEJ Trans. FM","IEEJ","Vol. 127","No. 11","pp. 675-680",2007,Nov. "Yusuke Sakai,Takanori Komatsu,Yifan Xiao,INHO SONG,MASATO WATANABE,AKITOSHI OKINO,EIKI HOTTA","Soft X-ray radiation from nitrogen filled capillary z-pinch plasma","International Symposium on Discharges and Electrical Insulation in Vacuum",,,,,,2006,Sept. "岸望,飯塚直哉,坂本敏郎,宋仁皓,小林靖典,S.R. Mohanty,渡辺正人,沖野晃俊,堀田栄喜","同軸二重ノズル型電極を用いたEUV光源の出力特性","平成18年電気学会基礎・材料・共通部門大会","平成18年電気学会基礎・材料・共通部門大会(CD-ROM)",,,,"pp. 259",2006,Aug. "Yusuke Sakai,Takanori Komatsu,Yifan Xiao,INHO SONG,MASATO WATANABE,AKITOSHI OKINO,EIKI HOTTA","Soft X-ray radiation from nitrogen filled Z-pinch plasma produced by capillary discharge","The 33rd IEEE International Conference on Plasma Science",,"IEEE",,,"p. 314, 3P30",2006,June "Naoya Iizuka,Toshiro Sakamoto,Yasunori Kobayashi,Inho Song,Smruti R. Mohanty,Masato Watanabe,AKITOSHI OKINO,Eiki Hotta","Optimization of a gas jet-type Z-pinch discharge EUV light source","平成18年度日本分光学会春季講演会・シンポジウム",,"日本分光学会",,,,2006,May "Smruti Mohanty,T.Sakamoto,Y.Kobayashi,INHO SONG,MASATO WATANABE,Tohru Kawamura,AKITOSHI OKINO,KAZUHIKO HORIOKA,E.Hotta","Miniature hybrid plasma focus extreme ultraviolet source driven by 10 kA fast current pulse",,"Review of Scientific Instruments",,"Vol. 77","No. 043506","pp. 1-7",2006,Apr. "INHO SONG,Kazuhiro Iwata,Yusuke Homma,Smruti Mohanty,MASATO WATANABE,Tohru Kawamura,AKITOSHI OKINO,KOICHI YASUOKA,KAZUHIKO HORIOKA,Eiki Hotta","A comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera",,"Plasma Sources Science and Technology",,"Vol. 15",,"pp. 322-327",2006,Apr. "INHO SONG","Study on Z-pinch plasma light source for EUV lithography",,,,,,,2005,Dec. "INHO SONG,Kazuhiro IWATA,Yusuke HOMMA,Smruti Mohanty,MASATO WATANABE,Tohru Kawamura,AKITOSHI OKINO,KOICHI YASUOKA,KAZUHIKO HORIOKA,Eiki HOTTA","Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by Different dI/dt Discharge Current Pulses",,"Jpn. J. Appl. Phys.",,"Vol. 44","No. 12","pp. 8640-8645",2005,Dec. "渡邊正人,宋仁皓,小林靖典,坂本敏郎,S.R.Mohanty,沖野晃俊,堀岡一彦,堀田栄喜","同軸ノズル型電極を用いた放電プラズマからのEUV発光特性","応用物理学会秋季講演会","第66回応用物理学会学術講演会講演予稿集",,,"No. 2","pp. 582",2005,Sept. "渡邊正人,宋仁皓,小林靖典,坂本敏郎,S.R.Mohanty,沖野晃俊,堀岡一彦,堀田栄喜","同軸ノズル型電極を用いた放電プラズマからのEUV発光特性","応用物理学会秋季講演会","第66回応用物理学会学術講演会講演予稿集",,,"No. 2","pp. 582",2005,Sept. "INHO SONG,Smruti Mohanty,MASATO WATANABE,Tohru Kawamura,AKITOSHI OKINO,KAZUHIKO HORIOKA,HOTTA Eiki","Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography",,"J.Plasma Fusion Res.",,"Vol. 81","No. 9","pp. 647-648",2005,Sept. "Inho Song,Yasunori Kobayashi,Toshiro Sakamoto,Smruti R. Mohanty,Masato Watanabe,Akitoshi Okino,Tohru Kawamura,Koichi Yasuoka,Kazuhiko Horioka,Eiki Hotta","Performance of a Gas Jet Type Z-Pinch EUV Light Source","International Conference on Miro- and Nano-Engineering","31st International Conference on Micro- Nano-Engineering",,,,"pp. 3-b-05",2005,Sept. "INHO SONG,K.Iwata,Y.Homma,S.R.Mohanty,MASATO WATANABE,Tohru Kawamura,AKITOSHI OKINO,KOICHI YASUOKA,KAZUHIKO HORIOKA,EIKI HOTTA","Development of a gas jet type Z-pinch EUV light source for lithography","International Pulsed Power Conference 2005",,"IEEE",,,,2005,June