"Tomohiro Shinagawa,Shinsuke Miyajima,Akira Yamada,Makoto Konagai","LOW TEMPERATURE DEPOSITION OF ALMINNUM DOPED HYDROGENATED NANO CRYSTALLINE CUBIC SILICON CARBIDE FOR THE WINDOW LAYER OF SILICON-BASED THIN-FILM SOLAR CELLS WITH A WIDEGAP I-LAYER","18th International Photovoltaic Science and Engineering",,,,,,2009,Jan. "•iμ—FG,ΰV‘Ί ½,‹{“‡W‰ξ,ŽR“c –Ύ,¬’·ˆδ ½","VHFƒvƒ‰ƒYƒ}CVD–@‚Ι‚ζ‚ιnŒ^ƒiƒmŒ‹»SiC:H”––Œ‚Μ’α‰·‘͐Ο","‘ζ68‰ρ‰ž—p•¨—Šw‰οH‹GŠwpu‰‰‰ο","‘ζ68‰ρ‰ž—p•¨—Šw‰οH‹GŠwpu‰‰‰ο",,,,"pp. 4p-M-16",2007,Sept.