"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Katsuyuki Machida,Parthojit Chakraborty,Shin-ichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure",,"IEEE Sensors Journal",,"Vol. 22","Issue 15",,2022,June
"“àŽR�W�G,ŽÄ“cŸä•½,‘å�¼“N,Žs�ì�’Žu,”Ñ“c�Tˆê,—›�®ž@,�ÎŒ´�¸,’¬“c�Ž”V,‰vˆê�Æ,ˆÉ“¡�_”V","ƒ�ƒCƒhƒŒƒ“ƒWAu�Ž1Ž²MEMS‰Á‘¬“xƒZƒ“ƒT‚ÌŒŸ“¢","‘æ13‰ñ�W�ω»MEMSƒVƒ“ƒ|ƒWƒEƒ€",,,,,,2021,Nov.
"‘å�¼“N,“àŽR�W�G,ŽÄ“cŸä•½,Žs�ì�’Žu,—›�®ž@,”Ñ“c�Tˆê,�ÎŒ´�¸,’¬“c�Ž”V,‰vˆê�Æ,ˆÉ“¡�_”V","3ŽŸŒ³—e—ÊŒŸ�o“d‹É‚É‚æ‚é’PˆêAu�Ž3Ž²MEMS‰Á‘¬“xƒZƒ“ƒT‚ÌŒŸ“¢","‘æ13‰ñ�W�ω»MEMSƒVƒ“ƒ|ƒWƒEƒ€",,,,,,2021,Nov.
"ŽÄ“cŸä•½,“àŽR�W�G,‘å�¼“N,—›�®ž@,’¬“c�Ž”V,�ÎŒ´�¸,‰vˆê�Æ,ˆÉ“¡�_”V","Au�Ž1Ž²�·“®Œ^CMOS-MEMS‰Á‘¬“xƒZƒ“ƒT‚Ì“��‡�ÝŒvƒVƒ~ƒ…ƒŒ�[ƒVƒ‡ƒ“‚ÌŒŸ“¢","‘æ13‰ñ�W�ω»MEMSƒVƒ“ƒ|ƒWƒEƒ€",,,,,,2021,Nov.
"‘å�¼“N,“àŽR�W�G,ŽÄ“cŸä•½,Žs�ì�’Žu,—›�®ž@,”Ñ“c�Tˆê,�ÎŒ´�¸,’¬“c�Ž”V,‰vˆê�Æ,ˆÉ“¡�_”V","3D—e—ÊŒŸ�o“d‹É‚É‚æ‚é’PˆêAu�Ž3Ž²MEMS‰Á‘¬“xƒZƒ“ƒT‚ÌŒŸ“¢","‘æ82‰ñ ‰ž—p•¨—�Šw‰ï�H‹GŠw�p�u‰‰‰ï",,,,,,2021,Sept.
"ŽÄ“cŸä•½,“àŽR�W�G,‘å�¼“N,—›�®ž@,�ÎŒ´�¸,’¬“c�Ž”V,‰vˆê�Æ,ˆÉ“¡�_”V","1Ž²�·“®Œ^CMOS-MEMS‰Á‘¬“xƒZƒ“ƒT‚Ì“��‡�ÝŒvƒVƒ~ƒ…ƒŒ�[ƒVƒ‡ƒ“‚ÌŒŸ“¢","—ߘa3”N“xE•”–å‘��‡Œ¤‹†‰ï",,,,,,2021,July
"Akihiro Uchiyama,Takasi Ichikawa,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A MEMS accelerometer with a single axis two proof masses for a wide detection range","Transducers",,,,,,2021,June
"“àŽR�W�G,Žs�ì�’Žu,ŽÄ“cŸä•½,”Ñ“c�Tˆê,—›�®ž@,�ÎŒ´�¸,’¬“c�Ž”V,‰vˆê�Æ,ˆÉ“¡�_”V","ƒ�ƒCƒhƒŒƒ“ƒWŒŸ�o‰Â”\‚ÈAu�Ž1Ž²MEMS‰Á‘¬“xƒZƒ“ƒT ‚ÌŒŸ“¢","‰ž—p•¨—�Šw‰ï�t‹GŠw�p�u‰‰‰ï",,,,,,2021,Mar.
"Takasi Ichikawa,Akihiro Uchiyama,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer","Inertial",,,,,,2021,Mar.
"ŽÄ“cŸä•½,Žs�ì �’Žu,ŒÃ‰ê ’B–ç,’¬“c �Ž”V,‰v ˆê�Æ,�ÎŒ´�¸,”Ñ“c �Tˆê,ˆÉ“¡ �_”V","�‚•ª‰ð”\’PˆêAu �ŽCMOS-MEMS ‰Á‘¬“xƒZƒ“ƒT‚ÌŒŸ“¢","‘æ12‰ñ�W�ω»MEMSƒVƒ“ƒ|ƒWƒEƒ€",,,,,,2020,Oct.
"Takashi Ichikawa,Kohei Shibata,Tatsuya Koga,Katsuyuki Machida,Shinichi Iida,Noboru Ishihara,Kazuya Masu,Hiroyuki Ito","A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer","International Conference on Solid State Devices and Materials",,,,,,2020,Sept.