"Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics","The 38th International Conference of Photopolymer Science and Technology (ICPST-38)",,,,,,2021,June "大西有希,山下龍之介,天谷賢治,平井義彦","反応速度論に基づくUV硬化収縮と熱変形を考慮したUVインプリントの形状変形解析","第26回計算工学講演会",,,,,,2021,May "Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing",,"Journal of Vacuum Science & Technology B",,,,,2021, "大西有希,山下龍之介,天谷賢治,平井義彦","UVインプリントにおける硬化収縮によるパターン形状変形の数値解析","第25回計算工学講演会","第25回計算工学講演会論文集",,,,,2020,June "Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Numerical Analysis of Pattern Shape Deformation in UV Imprint Due to Curing Shrinkage",,"Journal of Photopolymer Science and Technology",,"Vol. 33","No. 2","pp. 245--250",2020,May "Yuki Onishi,Ryunosuke Yamashita,Kenji Amaya,Yoshihiko Hirai","Numerical modeling method for UV imprint process simulation using thermoviscoelastic constitutive equations",,"Journal of Vacuum Science & Technology B",,"Vol. 37","No. 6",,2019,Oct. "R. Yamashita,Y. Onishi,K. Amaya,Y. Hirai","A Validation of UV Imprint Process Simulation using a Thermo-viscoelastic Constitutive Model","The 45th Micro & Nano Engineering Conference (MNE2019)",,,,,,2019,Sept. "渡辺謙太,砂川弘樹,山下龍之介,安田雅昭,大西有希,川田博昭,平井義彦","ナノインプリントにおけるレジスト収縮の補正(3D形状補正)","第66回 応用物理学会春季学術講演会",,,,,,2019,Mar. "Ryunosuke YAMASHITA,Yuki ONISHI,Kenji AMAYA","Numerical modeling method to reproduce UV imprint process using thermo-viscoelastic constitutive law","Micro & Nano Engineering Conference (MNE2018)",,,,,,2018,Sept.