"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Gou Motohashi,Ken Kagaya,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1G MEMS Accelerometer","IEEE SENSORS 2013",,,,,"pp. 171-174",2013,Nov. "Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Gou Motohashi,Ken Kagaya,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION","17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)",,,,,"pp. 22-25",2013,June "Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Gou Motohashi,Ken Kagaya,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer",,"Japanese Journal of Applied Physics",,"Vol. 52","No. 6","pp. 06GL04",2013,June "加賀谷 賢,小西敏文,山根大輔,本橋 剛,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型CMOS-MEMS加速度センサのためのデバイスの評価","第60回応用物理学会春季学術講演会・合同セッションL(MEMS、NEMSの基礎と応用:異種機能集積化)",,,,,,2013,Mar. "小西敏文,山根大輔,本橋 剛,加賀谷 賢,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型MEMS加速度センサの設計","第60回応用物理学会春季学術講演会・合同セッションL(MEMS、NEMSの基礎と応用:異種機能集積化)",,,,,,2013,Mar. "山根大輔,小西敏文,松島隆明,本橋 剛,加賀谷 賢,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型MEMS加速度センサの検討","第60回応用物理学会春季学術講演会・合同セッションL(MEMS、NEMSの基礎と応用:異種機能集積化)",,,,,,2013,Mar. "山根大輔,本橋 剛,小西敏文,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型CMOS-MEMS加速度センサのためのデバイスの検討","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct. "本橋 剛,小西敏文,松島隆明,山根大輔,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","0.35μmCMOS-LSIによるMEMSセンサ用VCO回路の検討","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct. "Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Gou Motohashi,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers","25th Int. Microprocesses and Nanotechnology Conference (MNC 2012)",,,,,,2012,Oct. "松島 隆明,小西 敏文,本橋 剛,山根 大輔,伊藤 浩之,石原 昇,年吉 洋,町田 克之,益 一哉","アレイ型CMOS-MEMS加速度センサの検討(3)","2012年秋期第73会応用物理学会学術講演会",,,,,,2012,Sept. "Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Gou Motohashi,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer","2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)",,,,,,2012,Sept. "本橋 剛,小西 敏文,松島 隆明,山根 大輔,伊藤 浩之,石原 昇,年吉 洋,町田 克之,益一哉","アレイ型CMOS-MEMS加速度センサの検討(4)","2012年秋期第73会応用物理学会学術講演会",,,,,,2012,Sept. "山根大輔,本橋剛,小西敏文,松島隆明,伊藤浩之,石原昇,年吉洋,町田克之,益一哉","アレイ型CMOS-MEMS加速度センサの検討",,,,,,,2012,July "山根大輔,本橋 剛,小西敏文,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型CMOS-MEMS加速度センサの検討","応用物理学会・集積化MEMS技術研究会主催 第3回集積化MEMS技術研究ワークショップ",,,,,,2012,July "本橋剛,小西敏文,松島隆明,伊藤浩之,石原昇,年吉洋,町田克之,益一哉","アレイ型CMOS-MEMS 加速度センサの検討(1)","第59 回応用物理学関係連合講演会","第59 回応用物理学関係連合講演会 講演予稿集","応用物理学会",,,"pp. 22-019",2012,Mar. "小西敏文,本橋剛,松島隆明,伊藤浩之,石原昇,年吉洋,町田克之,益一哉","アレイ型CMOS-MEMS 加速度センサの検討 (2)","第59 回応用物理学関係連合講演会","第59 回応用物理学関係連合講演会 講演予稿集","応用物理学会",,,"pp. 22-020",2012,Mar. "本橋 剛,小西敏文,松島隆明,山根大輔,伊藤浩之,益一哉,町田克之","0.35μmCMOS-LSIによるMEMSセンサ用VCO回路の検討",,,,,,,2012,