"E.Tokumitsu,Y.Takano,H.Shibata,H.Saiki","Fabrication and Characterization of M-I-FIS ferroelectric-gate structures using HfAlOx buffer layer",,"Journal of Microelectronic Engineering",,"Vol. 84",,"pp. 2018-2021",2007,June "‚–ì —Fˆê,Ö–Ø”Ž˜a,ŽÄ“cG,“¿Œõ‰i•ã","‹à‘®^≑Ì^‹­—U“d‘Ì^≑Ì^”¼“±‘Ì\‘¢iM-I-FIS\‘¢jƒLƒƒƒpƒVƒ^‚Ì컂ƕ]‰¿","‘æ54‰ñ‰ž—p•¨—ŠwŠÖŒW˜A‡u‰‰‰ï",,,,"No. 29a-SV-4",,2007,Mar.