"Devi Srujana Tenneti,Chihaya Mukaide,Kisuke Miyado,Torauto Yamada,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage",,"Japanese Journal of Applied Physics",,"Vol. 64",,"p. 04SP20",2025,Apr. "Masato Sone,Tso-Fu Mark Chang,Tomoyuki Kurioka,Chun-yi Chen,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake","Material Control & Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer","Material World 2025, 3rd Global Conference on Materials Science & Engineering","Material World 2025, 3rd Global Conference on Materials Science & Engineering",,,,,2025,Apr. "飯間 翔太,栗岡 智行,菅野 翔太,Chun Yi-Chen,Tso-Fu Mark Chang,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","微小圧縮試験による Ti/Au 積層膜上の電解金めっき膜の機械特性評価","第72回応用物理学会春季学術講演会","応用物理学会春季学術講演会",,,,,2025,Mar. "WENDING HOU,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified Nickel Sulfamate Electrolyte toward MEMS Applications","第72回応用物理学会春季学術講演会","応用物理学会春季学術講演会",,,,,2025,Mar. "Shota Kanno,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Yung-Jung Hsu,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Micro-Mechanical Property of Electrodeposited Gold: Designing Movable Components in MEMS Devices","The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan (2024 ICGET-TW)",,,,,,2024,Nov. "宮井 良介,栗岡 智行,Chen Chun-Yi,Chang Tso-Fu Mark,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","静電容量型MEMS 加速度センサーのための Ti/Au 積層マイクロカンチレバーの構造安定性に対する熱処理の影響評価","Future Technologies fromSENDAI 2024 第 16 回集積化MEMSシンポジウム",,,,,,2024,Nov. "渡邉春海,栗岡智行,陳君怡,Tso-Fu Mark Chang,TENNETIDEVI,町田克之,伊藤浩之,三宅美博,曽根正人","MEMS 加速度センサのための Ti/Au 多層カンチレバーの 実効ヤング率に対する測定電圧依存性に関する研究","Future Technologies fromSENDAI 2024 第 16 回集積化MEMSシンポジウム",,,,,,2024,Nov. "Masato Sone,Tso-Fu Mark Chang,Tomoyuki Kurioka,Chun-yi Chen,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake","Material Property Control of Multi-layered Ti/Au Microcomponents by Electroplating Toward Ultra high-Sensitive MEMS Inertial Sensors","2024 ICGET-Tw: The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan","2024 ICGET-Tw",,,,,2024,Nov. "Shunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Tenneti Devi Srujana,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,2024,Oct. "Masato Sone,Ryohei Hori,Kazuya Fujita,Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Tomoyuki Kurioka,Tso-Fu Mark Chang,Chun-Yi Chen,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake","Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Dold and Gold-Copper Alloys by Micro-\bending Test Toward MEMS Applications","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,2024,Oct. "Tomoyuki Kurioka,Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,,2024,Oct. "Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,,2024,Oct. "Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Devi Srujana Tenneti,Kisuke Miyado,Chihaya Mukaide,Torauto Yamada,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Kisuke Miyado,Torauto Yamada,Devi Srujana Tenneti,Chihaya Mukaide,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Strain Rate Sensitivity in Gold Micro-Pillars: Designing MEMS Components with Grain Boundary and Sample Size Effects","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Syunkai Watanabe,Shunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Tenneti Devi Srujana,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Kazuya Fujita,Kosuke Suzuki,Keisuke Asano,Chun-Yi Chen,Tomoyuki Kurioka,Katsuyuki. Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","Simultaneous Necking and Barreling Deformation Behaviors in Bending of Single Crystal Gold Micro-Cantilever",,"Materials","MDPI","Vol. 17","No. 16","p. 4054",2024,Aug. "Aravind Tharayil Narayanan,Ludovico Minati,Aran Hagihara,Jun Kobayashi,Toshihiro Shimura,Yoichi Kawano,Parthojit Chakraborty,Jim Bartels,Korkut Kaan Tokg?z,Shiro Dosho,Toshihide Suzuki,Hiroyuki Ito","A neural network-based DPD coefficient determination for PA linearization in 5G and beyond-5G mmWave systems",,"IEICE Electronics Expres",,"Vol. 21","No. 10","Page 20240186",2024,May "Zixuan Li,Sangyeop Lee,Noboru Ishihara,Hiroyuki Ito","RC-oscillator-based battery-less wireless sensing system using RF resonant electromagnetic coupling,",,,"IEICE Transactions on Fundamentals of Electronics Communications and Computer Sciences",,,,2024,May "Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Cross-Sectional Geometry Effect on Bending Strength of Gold Micro-Cantilever with Trapezoidal Cross-Section",,"Micro and Nano Engineering",,"Vol. 23",,"p. 100259",2024,May "Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component",,"Micro and Nano Engineering",,"Vol. 23",,"p. 100254",2024,Apr. "菅野 翔太,大村 太郎,栗岡 智行,Chun-Yi Chen,町田 克之,伊藤 浩之,三宅 美博,Tso-Fu Mark Chang,曽根 正人","MEMS加速度センサへの応用に向けためっき金の微小圧縮試験によるひずみ速度依存性調査","第71回応用物理学会春季学術講演会","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-3",2024,Mar. "Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers ?",,"Micro and Nano Engineering",,"Vol. 29",,"p. 100249",2024,Mar. "Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers",,"Micro and Nano Engineering",,"Vol. 23",,"p. 100244",2024,Mar. "森 達彦,栗岡 智行,Chen Chun-Yi,Chang Tso-Fu Mark,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価","第71回応用物理学会春季学術講演会","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-2",2024,Mar. "宮井 良介,栗岡 智行,Chun-Yi Chen,Tso-Fu Mark Chang,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価","第71回応用物理学会春季学術講演会","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-1",2024,Mar. "Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki ; Ito,Yoshihiro Miyake,Masato Sone","Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications",,"Journal of The Electrochemical Society",,"Vol. 171",,"p. 032501",2024,Feb. "Kisuke Miyado,Devi Srujana Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology",,"Japanese Journal of Applied Physics",,"Vol. 63","No. 4","p. 04SP23",2024,Feb. "Shuhei Amakawa,Ryotaro Sugimoto,Korkut Kaan Tokgoz,Sangyeop Lee,Hiroyuki Ito,Ryoko Kishikawa","Signal-flow-graph analysis of weakly nonlinear microwave circuits around a large-signal operating point","IEEE RADIO & WIRELESS WEEK",,,,,,2024,Jan. "Ryohei Hori,Kazuya Fujita,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength","Taiwan Association for Coating and Thin Film Technology (TACT2023)","Taiwan Association for Coating and Thin Film Technology (TACT2023)",,,,,2023,Nov. "御宿 希祐,大西 哲 Tenneti Devi Srujana 町田克之,TENNETI DEVI,町田 克之,栗岡 智行,Tso-Fu Mark Chang,曽根正人,三宅美博,伊藤浩之","Au錘1軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討","第15回集積化MEMSシンポジウム","第15回集積化MEMSシンポジウム論文集","応用物理学会集積化MEMS技術研究会","Vol. 8A2-D-4",,,2023,Oct. "Masato Sone,Tso-Fu Mark Chang,Tomoyuki Kurioka,Chun-yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake","Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers","244th ECS Meeting","244th ECS Meeting",,,,,2023,Oct. "Syota Kanno,Taro Omura,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone,Tso-Fu Mark Chang","Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept. "御宿 希祐,大西 哲,Devi Srujana Tenneti,町田 克之,栗岡智行,CHAKRABORTYP,Tso-Fu Mark Chang,曽根正人,三宅美博,伊藤浩之","Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討","第84回応用物理学会秋季学術講演会","第84回応用物理学会秋季学術講演会 講演予稿集",,"Vol. 20p-B201-1",,,2023,Sept. "御宿 希祐Kisuke Miyado,Devi.Srujana Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Parthojit CHAKRABORTY,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer","2023 International Conference on Solid State Devices and Materials","Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02",,,,,2023,Sept. "Takumi Akiyama,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers ?",,"Micro and Nano Engineering",,"Vol. 21",,"p. 100226",2023,Sept. "Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2023","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept. "Ryosuke Miyai,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer","49th international conference on Micro and Nano Engineering (MNE2023)","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept. "Shuhei Amakawa,Ryotaro Sugimoto,Korkut Kaan Tokgoz,Sangyeop Lee,Hiroyuki Ito,Ryoko Kishikawa","Signal-Flow-Graph Analysis of Weakly Nonlinear Microwave Circuits around a Large-Signal Operating Point",,"IEEE Transactions on Microwave Theory and Techniques",,,,,2023,Sept. "御宿 希祐,Tenneti Devi Srujana,町田 克之,栗岡 智行,Tso-Fu Mark Chang,曽根 正人,三宅 美博,伊藤 浩之","1 軸差動型CMOS-MEMS加速度センサのFB電圧による錘変位特性の検討","第14回集積化MEMS技術研究ワークショップ",,," p04",,,2023,Aug. "Shiro Dosho,Ludovico Minati,Kazuki Maari,Hiroyuki Ito","A Compact 0.9uW Direct-Conversion Frequency Analyzer for Speech Recognition with Wide-Range Q-Controlable Bandpass Rectifier","2023 Symposium on VLSI Technology and Circuits",,,,,,2023,June "Jim Bartels,Aran Hagihara,Ludovico Minati,Korkut Kaan Tokgoz,Hiroyuki Ito","An Integer-Only Resource-Minimized RNN on FPGA for Low-Frequency Sensors in Edge-AI",,"IEEE Sensors Journal",,"Vol. 23","No. 15","pp. 17784 - 17793",2023,June "佐藤 裕樹,石原 昇,伊藤 浩之","周波数同期型発振回路の時間分解能を利用した 1.2 V, 15.8 ビット容量-デジタル変換 IC",,"電気学会論文誌 E(センサ・マイクロマシン部門誌)","電気学会","Vol. 143","No. 6","pp. 96-101",2023,June "Kosuke Suzuki,Yiming Jiang,Ryohei Hori,Ken Hashigata,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold",,"Materials Today Communications",,"Vol. 35",,"p. 106072",2023,Apr. "Hiroki Sato,Hiroyuki Ishiwata,Shinji Murata,Noboru Ishihara,Hiroyuki Ito","Stable-operation design and fabrication results of a battery-less wireless-sensor interface IC with a switched-capacitor frequency-locked-loop circuit",,"Japanese Journal of Applied Physics",,"Vol. 62","No. SC1087","pp. 1-12",2023,Mar. "渡邉 春海,Chen Chun-Yi,栗岡 智行,Chang Tso-Fu Mark,大西 哲,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar. "菅野 翔太,大村 太郎,栗岡 智行,Chun-Yi Chen,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人,Tso-Fu Mark Chang","金めっき微小ピラー構造体の微小圧縮試験におけるひずみ速度依存性とサンプルサイズ効果の解明","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-2",2023,Mar. "保里 亮平,藤田 一矢,Chun-Yi Chen,栗岡 智行,Tso-Fu Mark Chang,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","単結晶金微小カンチレバーの曲げ強度に対する断面積の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar. "Ludovico Minati,Chao Li,Jim Bartels,Parthojit Chakraborty,Zixuan Li,Natsue Yoshimura,Mattia Frasca,Hiroyuki Ito","Accelerometer time series augmentation through externally driving a non-linear dynamical system",,"Chaos, Solitons and Fractals: the interdisciplinary journal of Nonlinear Science, and Nonequilibrium and Complex Phenomena",,"Vol. 168",,"p. 113100",2023,Mar. "Takuya Washio,Miki Saijo,Hiroyuki Ito,Ken-ichi Takeda,Takumi Ohashi","Meat the challenge: Segmentation and profiling of Japanese beef mince and its substitutes consumers",,"Meat Science","Elsevier Ltd.","Vol. 197","no. 109047","pp. 1-11",2023,Mar. "Akira Onishi,Kisuke Miyado,Devi Srujana Tenneti,Katsuyuki Machida,Parthojit Chakraborty,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)",,,,,2023,Mar. "宮井 良介,栗岡 智行,Chun-Yi Chen,Tso-Fu Mark Chang,大西 哲,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-5",2023,Mar. "御宿 希祐,大西哲,TENNETIDEVI,町田克之,CHAKRABORTYP,曽根正人,三宅美博,伊藤浩之","Au積層メタル技術によるMEMSデバイスのための九十九折ばね設計手法の検討","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",," 16a-B410-6",,,2023,Mar. "zixuan li,Sangyeop Lee,Noboru Ishihara,Hiroyuki Ito","Low-power and high-resolution capacitance sensing using CMOS inverter-based RC oscillator by employing voltage-integration feedback",,"Japanese Journal of Applied Physics",,,,,2023,Feb. "Arisa Kimura,Kaito Kuroki,Ryoichiro Yoshida,Kenji Hirakawa,Masayuki Iwase,Munehiro Ogasawara,Takashi Yoda,Noboru Ishihara,Hiroyuki Ito","Simulation of a ring oscillator operation during γ-ray irradiation using the TID response model of MOSFETs and its experimental verification",,"Japanese Journal of Applied Physics",,"Vol. 62",," SC1060",2023,Feb. "Kaito Kuroki,Arisa Kimura,Kenji Hirakawa,Masayuki Iwase,Munehiro Ogasawara,Takashi Yoda,Noboru Ishihara,Hiroyuki Ito","Design and Fabrication Results of Z-gate Layout MOSFETs for Radiation Hardness Integrated Circuit",,"Japanese Journal of Applied Physics",,"Vol. 62"," SC1045",,2023,Jan. "佐藤 裕樹,石原 昇,伊藤 浩之","周波数同期型発振回路の時間分解能を利用した1.2V, 15.8ビット容量-デジタル変換IC","第39回「センサ・マイクロマシンと応用システム」シンポジウム","第39回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2022,Nov. "Chao Li,Ludovico Minati,Korkut Kaan Tokgoz,Masamoto Fukawa,Jim Bartels,Sihan A,Ken-ichi Tekeda,Hiroyuki Ito","Integrated Data Augmentation for Sensor Time series in Cattle Behavior Recognition: Roles of Sampling, Balancing and Fourier Surrogates",,"IEEE Sensors Journal",,"vol. 22","no. 24","pp. 24230-24241",2022,Nov. "Shuhei Amakawa,Ryotaro Sugimoto,Korkut Kaan Tokgoz,Sangyeop Lee,Hiroyuki Ito","Signal-flow-graph analysis of weakly nonlinear RF circuits","International Symposium on Biomedical Engineering",,,,,,2022,Nov. "Sangyeop Lee,Masao Fujita,Masayuki Toyoda,Kyoya Takano,Shinsuke Hara,Watanabe Issei,Akifumi Kasamatsu,Shuhei Amakawa,Takeshi Yoshida,Hiroyuki Ito","A transparent band-pass-filtered reflector for IEEE Standard 802.15.3d","IEEE Asia-Pacific Microwave Conference",,,,,,2022,Nov. "李尚曄,藤田真男,高野恭弥,原紳介,渡邊一世,笠松章史,伊藤浩之","300GHz帯広帯域電波吸収体の研究開発","シンポジウム「テラヘルツ科学の最先端?」",,,,,,2022,Nov. "Zixuan Li,Sangyeop Lee,Noboru Ishihara,Hiroyuki Ito","Low-jitter CMOS inverter-based RC oscillator with voltage-integration feedback for sensor interface","International Conference on Solid State Devices and Materials (SSDM)",,,,,,2022,Sept. "Ryohei Hori,Kazuya Fujita,Chun Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept. "Takumi Akiyama,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept. "Taro Omura,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept. "Arisa Kimura,Kaito Kuroki,Ryoichiro Yoshida,Kenji Hirakawa,Masayuki Iwase,Munehiro Ogasawara,Takashi Yoda,Noboru Ishihara,Hiroyuki Ito","CMOS Inverter-Base Ring Oscillator Design and Evaluation Against gray Total Ionizing Dose Effect","International Conference on Solid State Devices and Materials","International Conference on Solid State Devices and Materials",,,,,2022,Sept. "Kaito Kuroki,Arisa Kimura,Kenji Hirakawa,Masayuki Iwase,Munehiro Ogasawara,Takashi Yoda,Noboru Ishihara,Hiroyuki Ito","A Z-gate Layout MOSFET Design and Verification of Radiation Hardness against γ-ray Total Ionizing Dose Effect","International Conference on Solid State Devices and Materials","International Conference on Solid State Devices and Materials","JJAP",,,,2022,Sept. "Hiroki Sato,Hiroyuki Ishiwata,Shinji Murata,Noboru Ishihara,Hiroyuki Ito","High-Resolution Sensor Interface IC with SwitchedCapacitor Frequency Locked Loop Circuit for Battery-less RF Backscatter Sensing","International Conference on Solid State Devices and Materials","International Conference on Solid State Devices and Materials","JJAP",,,,2022,Sept. "石原昇,田畑美幸,伊藤浩之","無線信号反射を利用した 低電力ワイヤレスpHセンシング",,"電気学会誌","電気学会",,,,2022,Sept. "Masato Sone,Hitomi Watanabe,Kyotaro Nitta,Hideaki Nakajima,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Tso-Fu Mark Chang","A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept. "御宿 希祐,大西哲,TENNETIDEVI,CHAKRABORTYP,町田克之,飯田慎一,小西敏文,曽根正人,三宅美博,伊藤浩之","エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討","第83回応用物理学会秋季学術講演会","第83回応用物理学会秋季学術講演会",," 22a-A406-2",,,2022,Sept. "Tomoyuki Kurioka,Koichiro Tachibana,Kyotaro Nitta,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Masato Sone","Evaluation of Streucture Stability of Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept. "御宿 希祐,大西哲,TENNETIDEVI,CHAKRABORTYP,町田克之,飯田慎一,小西敏文,曽根正人,三宅美博,伊藤浩之","Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討","第13回集積化MEMS技術研究ワークショップ",,,,,,2022,Aug. "Sangyeop Lee,Masao Fujita,Masayuki Toyoda,Kyoya Takano,Shinsuke Hara,Watanabe Issei,Akifumi Kasamatsu,Hiroyuki Ito","Sub-terahertz electromagnetic-wave absorber for future wireless communication","IEEE International Symposium on Frequency Integration Technology",,,,,,2022,Aug. "Nao Takizawa,Takuya Washio,Masamoto Fukawa,Ken-ichi Takeda,Hiroyuki Ito,Miki Saijo,Takumi Ohashi","Human-Centered Design of Cattle Behavior Monitoring System for Grazing in Abandoned Farmland","13th International Conference on Applied Human Factors and Ergonomics (AHFE 2022) and the Affiliated Conferences","Human Factors in Accessibility and Assistive Technology","AHFE Open Access","Vol. 37",,"pp. 117-124",2022,July "Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Katsuyuki Machida,Parthojit Chakraborty,Shin-ichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure",,"IEEE Sensors Journal",,"Vol. 22","Issue 15",,2022,June "Sangyeop Lee,Masao Fujita,Masayuki Toyoda,Kyoya Takano,Shinsuke Hara,Issei Watanabe,Akifumi Kasamatsu,Hiroyuki Ito","Ultra-wideband electromagnetic-wave absorber for IEEE 802.15.3d","Global Symposium on Millimeter Waves",,,,,,2022,May "Chao LI,Korkut Kaan TOKGOZ,Ayuka OKUMURA,Jim BARTELS,Kazuhiro TODA,Hiroaki MATSUSHIMA,Takumi OHASHI,Ken-ichi TAKEDA,Hiroyuki Ito","A Data Augmentation Method for Cow Behavior Estimation Systems Using 3-Axis Acceleration Data and Neural Network Technology",,"IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences",,"Vol. E105.A","No. 4","pp. 655-663",2022,Apr. "Ludovico Minati,Giacomo Innocenti,Gorana Mijatovic,Hiroyuki Ito,Mattia Frasca","Mechanisms of chaos generation in an atypical single-transistor oscillator",,"Chaos, Solitons & Fractals",,"Vol. 157",,,2022,Apr. "木村有佐,黒木海斗,吉田僚一郎,平川顕二,岩瀬正幸,小笠原宗博,依田孝,石原昇,伊藤浩之","リング発振ICのγ線照射影響の回路モデル化",,,,,,,2022,Mar. "Akira Onishi,Kohei Shibata,Akihiro Uchiyama,Katsuyuki Machida,Taiki Ogata,Noboru Ishihara,Hirotaka Uchitomi,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement",,"Japanese Journal of Applied Physics",,"Vol. 61",,"p. SD1028",2022,Mar. "Takashi Yoda,Noboru Ishihara,Yuta Oshima,Motoki Ando,Kohei Kashiwagi,Ryoichiro Yoshida,Arisa Kimura,Kaito Kuroki,Shinsuke Nabeya,Kenji Hirakawa,Masayuki Iwase,Munehiro Ogasawara,Hiroyuki Ito","Total ionizing dose effect on 2-D array data transfer ICs designed and fabricated by 0.18 μm CMOS technology",,"Japanese Journal of Applied Physics",,"Vol. 61",," SC1081-1",2022,Mar. "李尚曄,藤田真男,豊田将之,高野恭弥,原紳介,渡邊一世,笠松章史,伊藤浩之","誘電体のテラヘルツ帯測定結果による電波吸収体設計","電子情報通信学会マイクロ波研究会",,,,,,2022,Mar. "Jim Bartels,KORKUT KAAN TOKGOZ,SIHAN A,MASAMOTO FUKAWA,SHOHEI OTSUBO,CHAO LI,IKUMI RACHI,KEN-ICHI TAKEDA,LUDOVICO MINATI,HIROYUKI ITO","TinyCowNet: Memory- and Power-Minimized RNNs Implementable on Tiny Edge Devices for Lifelong Cow Behavior Distribution Estimation",,"IEEE Access",,"Vol. 10",,"pp. 32706 - 32727",2022,Mar. "天川修平,李尚曄,TokgozKorkutKaan,伊藤浩之","Circuit design and device modeling for biomedical applications","令和3年度生体医歯工学共同研究拠点成果報告会",,,,,,2022,Mar. "Gong Zhiyang,李尚曄,石原昇,伊藤浩之","A divide-by-18 injection locked frequency divider based on harmonic rejection,","電子情報通信学会総合大会",,,,,,2022,Mar. "黒木 海斗,木村 有佐,吉田 僚一郎,平川 顕二,岩瀬 正幸,小笠原 宗博,依田 孝,石原 昇,伊藤 浩之","CMOS集積回路におけるリーク電流への γ線照射の影響",,,,,,,2022,Mar. "Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression",,"Surface & Coatings Technology","Elsevier","Vol. 436",,"p. 128315",2022,Feb. "Ludovico Minati,Korkut Kaan Tokgoz,Hiroyuki Ito","Distributed sensing via the ensemble spectra of uncoupled electronic chaotic oscillators",,"Chaos, Solitons & Fractals",,"Vol. 155",,,2022,Feb. "Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics","The 2021 International Chemical Congress of Pacific Basin Societies (Pacifichem 2021)",,,,,,2021,Dec. "Chao Li,Hiroyuki Ito","Cattle Behavior Recognition Using Deep Learning Methods on Limited Sensory Data","IEICE-ICD Young Researchers Forum",,,,,,2021,Dec. "Sangyeop Lee,Noboru Ishihara,Hiroyuki Ito","mmW/THz applications for healthcare","International Symposium on Biomedical Engineering",,,,,,2021,Dec. "Munehiro Ogasawara,Ryoichiro Yoshida,Yuta Oshima,Motoki Ando,Arisa Kimura,Kenji Hirakawa,Masayuki Iwase,Shinsuke Nabeya,Takashi Yoda,Noboru Ishihara,Hiroyuki Ito","Dependence of total ionizing dose effect of nMOS transistors on the on/off duty ratio of a gate voltage",,"Japanese Journal of Applied Physics",,"Vol. 60",," 104501-1",2021,Dec. "Shuhei Amakawa,Sangyeop Lee,Korkut Kaan Tokgoz,Hiroyuki Ito","Visualizing small-signal responses of a nonlinear RF circuit under large signal operating conditions","International Symposium on Biomedical Engineering",,,,,,2021,Dec. "柴田滉平,内山晃宏,大西哲,李尚曄,町田克之,石原昇,益一哉,伊藤浩之","Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov. "Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov. "Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov. "大西哲,内山晃宏,柴田滉平,市川崇志,李尚曄,飯田慎一,石原昇,町田克之,益一哉,伊藤浩之","3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov. "Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov. "内山晃宏,柴田滉平,大西哲,市川崇志,飯田慎一,李尚曄,石原昇,町田克之,益一哉,伊藤浩之","ワイドレンジAu錘1軸MEMS加速度センサの検討","第13回集積化MEMSシンポジウム",,,,,,2021,Nov. "Chao Li,Korkut Kaan Tokgoz,Masamoto Fukawa,Jim Bartels,Takumi Ohashi,Ken-ichi Takeda,Hiroyuki Ito","Data Augmentation for Inertial Sensor Data in CNNs for Cattle Behavior Classification",,"IEEE Sensors Letters",,"Vol. 5","No. 11",,2021,Oct. "Hiroyuki Ito,Katsuyuki Machida,Noboru Ishihara,Yoshihiro Miyake,Kazuya Masu","A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds",,"ECS Transactions",,"Vol. 104","No. 4","pp. 83-91",2021,Oct. "藤田 一矢,鈴木 康介,陳 君怡,Chang Tso-Fu Mark,山根 大輔,伊藤 浩之,町田 克之,益 一哉,曽根 正人","金単結晶微小カンチレバーの機械的特性とサンプル形状効果","第82回応用物理学会秋季学術講演会","第82回応用物理学会秋季学術講演会",,,,,2021,Sept. "木村有佐,吉田僚一郎,安藤幹,大島佑太,鍋屋信介,平川顕二,岩瀬正幸,小笠原宗博,依田孝,石原昇,伊藤浩之","P型とN型のFETサイズ比が異なるCMOS論理回路へのγ線照射の影響","2021年 電子情報通信学会ソサイエティ大会",,,,,,2021,Sept. "吉田僚一郎,木村有佐,安藤幹,大島佑太,鍋屋信介,平川顕二,岩瀬正幸,石原昇,小笠原宗博,依田孝,伊藤浩之","ELT(Enclosed Layout Transistor)による耐放射線CMOS集積回路の設計","DAシンポジウム2021","情報処理学会シンポジウムシリーズ","情報処理学会",,,,2021,Sept. "Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept. "Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept. "Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept. "Motoaki Hara,Yuichiro Yano,Shinsuke Hara,Akifumi Kasamatsu,Tetsuya Ido,Hiroyuki Ito","Study of 3-GHz-Band thin-Film Bulk Acoustic Resonator Oscillators for Microfabricated Atomic Clocks","IEEE International Ultrasonics Symposium",,,,,,2021,Sept. "大西哲,内山晃宏,柴田滉平,市川崇志,李尚曄,飯田慎一,石原昇,町田克之,益一哉,伊藤浩之","3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討","第82回 応用物理学会秋季学術講演会",,,,,,2021,Sept. "木村有佐,吉田僚一郎,安藤幹,大島佑太,鍋屋信介,平川顕二,岩瀬正幸,小笠原宗博,依田孝,石原昇,伊藤浩之","CMOSリング発振回路へのγ線照射の影響とその要因解析","第34回 回路とシステムのワークショップ",,,,,,2021,Aug. "Takashi Yoda,Noboru Ishihara,Yuta Oshima,Motoki Ando,Ryoichiro Yoshida,Shinsuke Nabeya,Kenji Hirakawa,Masayuki Iwase,Munehiro Ogasawara,Hiroyuki Ito","CMOS 2-D Array Data Transfer Circuit Design and Evaluation for Use in A Radiation Environment","SSDM2021",,,,,,2021,July "Yi-Chieh Tsai,Chia-Hsuan Lee,Hsin-Chi Chang,Jui-Han Liu,Han-Wen Hu,Hiroyuki Ito,Young Suk Kim,Takayuki Ohba,Kuan-Neng Chen","Electrical Characteristics and Reliability of Wafer-on-Wafer (WOW) Bumpless Through Silicon Via",,"IEEE Transactions on Electron Devices",,"Vol. 68","No. 7","pp. 3520 - 3525",2021,July "柴田滉平,内山晃宏,大西哲,李尚曄,石原昇,町田克之,益一哉,伊藤浩之","1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討","令和3年度E部門総合研究会",,,,,,2021,July "市川 崇志,古賀 達也,飯田 慎一,石原 昇,町田 克之,益 一哉,伊藤 浩之","単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討","令和2年度E部門総合研究会",,,,,,2021,July "伊藤 浩之,Korkut Kaan Tokgoz,大橋 匠,竹田 謙一","超精密放牧のためのモニタリング技術開発",,"電子情報通信学会誌",,"Vol. 104","No. 6","pp. 544-551",2021,June "Akihiro Uchiyama,Takasi Ichikawa,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A MEMS accelerometer with a single axis two proof masses for a wide detection range","Transducers",,,,,,2021,June "Chao Li,Korkut Kaan Tokgoz,Ayuka Okumura,Jim Bartels,Masamoto Fukawa,Kazuhiro Toda,Hiroaki Matsushima,Takumi Ohashi,Ken-ichi Takeda,Hiroyuki Ito","Data Augmentation for Improving Deep Learning in Animal Behavior Classification","IEICE LSI and System Workshop",,,,,,2021,May "良知郁実,TokgozKorkutKaan,府川 政元,LIChao,BartelsJim,A SIHAN,李尚曄,竹田謙一,伊藤浩之","加速度センサを用いたウシ行動推定におけるサンプリングレートの検討","LSIシステムワークショップ",,,,,,2021,May "Tso-Fu Mark Chang,Hideaki Nakajima,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Hiroshi Toshiyoshi,Masato Sone","Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers",,"Advances in Microelectronics: Reviews","IFSA PUBLISHING, S.L.","Vol. 3",,,2021,Apr. "Hitomi Watanabe,Tso-Fu Mark Chang,Michael Schneider,Ulrich Schmid,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency",,"Electrochem","MDPI","Vol. 2",,"pp. 216-223",2021,Apr. "Takasi Ichikawa,Akihiro Uchiyama,Kohei Shibata,Shinichi Iida,Sangyeop Lee,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer","Inertial",,,,,,2021,Mar. "内山晃宏,市川崇志,柴田滉平,飯田慎一,李尚曄,石原昇,町田克之,益一哉,伊藤浩之","ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討","応用物理学会春季学術講演会",,,,,,2021,Mar. "木村有佐,吉田僚一郎,安藤幹,大島佑太,鍋屋信介,平川顕二,岩瀬正幸,小笠原宗博,依田孝,石原昇,伊藤浩之","リング発振回路におけるELTの耐放射線評価","第68回 応用物理学会春季学術講演会",,,,,,2021,Mar. "Chao Li,Korkut Kaan Tokgoz,Ayuka Okumura,Jim Bartels,Masamoto Fukawa,Kazuhiro Toda,Hiroaki Matsushima,Takumi Ohashi,Ken-ichi Takeda,Hiroyuki Ito","Data Augmentation of Inertial Sensor Data for Cattle Activity Classification us-ing a Long-Short Term Memory Network","集積回路研究会(ICD)学生・若手研究会",,,,,,2021,Mar. "鹿島光司,伊藤浩之,深水克郎,大場隆之","月での米作りのための自動化・センシング技術",,"電子情報通信学会誌",,"Vol. 104","No. 2","pp. 123-129",2021,Feb. "Korkut Kaan Tokgoz,Ludovico Minati,Hiroyuki Ito","Current-Starved Chaotic Oscillator Over Multiple Frequency Decades on Low-Cost CMOS",,,,,,"pp. 101 - 102",2021,Jan. "Ryo Onishi,Koki Miyamoto,Korkut Kaan Tokgoz,Noboru Ishihara,Hiroyuki Ito (","Capacitive Sensor Circuit with Relative Slope-Boost Method Based on a Relaxation Oscillator","Asia and South Pacific Design Automation Conference",,,,,"pp. 5 - 6",2021,Jan. "原基揚,矢野雄一郎,戸田雅也,原紳介,笠松章史,伊藤浩之,小野崇人,井戸哲也","マイクロ波原子時計チップの開発進捗","圧電材料・デバイスシンポジウム2021",,,,,,2021,Jan. "Motoaki Hara,Yuichiro Yano,Yuki Takahashi,Toshio Nishizawa,Shinsuke Hara,Akifumi Kasamatsu,Masanori Ueda,Hiroyuki Ito,Tetsuya Ido","Super-high-frequency-band injection locked two-divider oscillator using thin-film bulk acoustic resonator",,"Electronics Letters",,,,,2021, "Jim Bartels,Korkut Kaan Tokgoz,府川政元,大坪頌平,Chao Li,Ikumi Rachi,Ken-ichi Takeda,Hiroyuki Ito","LBCE: A Low Power Behavior Classification Engine using Time-Multiplexed GRU","電子情報通信学会 集積回路研究会 学生・若手研究会",,,,,,2020,Dec. "Takamaro Kikkawa,Yoshihiro Masui,Akihiro Toya,Hiroyuki Ito,Takuichi Hirano,Tomoaki Maeda,Masahiro Ono,Yoshitaka Murasaka,Toshifumi Imamura,Tsuyoshi Matsumaru,Michimasa Yamaguchi,Mitsutoshi Sugawara,Afreen Azhari,Hang Song,Shinsuke Sasada,Atsushi Iwata","CMOS Gaussian Monocycle Pulse Transceiver for Radar-Based Microwave Imaging",,"IEEE Transactions on Biomedical Circuits and Systems",,"Vol. 14","No. 6","pp. 1333-1345",2020,Dec. "府川政元,大坪頌平,Korkut Kaan Tokgoz,李尚曄,伊藤浩之","クラウド活用教師データ作成アプリの試作","電子情報通信学会 集積回路研究会 学生・若手研究会",,,,,,2020,Dec. "Chao Li,Korkut Kaan Tokgoz,Ayuka Okumura,Jim Bartels,Kazuhiro Toda,Hiroaki Matsushima,Takumi Ohashi,Ken-ichi Takeda,Hiroyuki Ito","Data Augmentation for Cow Behavior Estimation Systems Based on Neural Network Technology","International Workshop on Smart Info-Media Systems in Asia",,,,,,2020,Dec. "大坪頌平,府川政元,Jim Bartels,Korkut Kaan Tokgoz,李尚曄,竹田謙一,伊藤 浩之","放牧に対応したウシ行動推定デバイスの試作","電子情報通信学会 集積回路研究会 学生・若手研究会",,,,,,2020,Dec. "Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Dislocation Mechanics of Metal Plasticity and Fracturing (RonaldW. Armstrong, Ed)","MDPI",,,"pp. 87-96",2020,Nov. "Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties",,"Electrochem","MDPI","Vol. 1","No. 4","pp. 388-393",2020,Nov. "Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Sample Geometry on Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics","PRiME 2020","PRiME 2020",,,,,2020,Oct. "市川 崇志,内山晃宏,古賀 達也,町田 克之,石原昇,益 一哉,飯田 慎一,伊藤 浩之","100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct. "内山晃宏,市川 崇志,古賀 達也,町田 克之,益 一哉,石原昇,飯田 慎一,伊藤 浩之","Au錘一軸MEMS加速度センサの差動容量型電極構造の検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct. "柴田滉平,市川 崇志,古賀 達也,町田 克之,益 一哉,石原昇,飯田 慎一,伊藤 浩之","高分解能単一Au 錘CMOS-MEMS 加速度センサの検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct. "Kosuke Suzuki,Yu-An Chien,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test","PRiME 2020","PRiME 2020",,,,,2020,Oct. "内山晃宏,市川 崇志,古賀達也,飯田慎一,石原昇,町田克之,益一哉,伊藤浩之","マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept. "吉田僚一郎,木村有佐,安藤幹,大島佑太,鍋屋信介,平川顕二,岩瀬正幸,小笠原宗博,依田孝,石原昇,伊藤浩之","高累積線量におけるMOSFETのゲートバイアス特性比較","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept. "市川崇志,渥美賢,古賀達也,飯田慎一,石原昇,町田克之,益一哉,伊藤浩之","100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept. "Takashi Ichikawa,Kohei Shibata,Tatsuya Koga,Katsuyuki Machida,Shinichi Iida,Noboru Ishihara,Kazuya Masu,Hiroyuki Ito","A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer","International Conference on Solid State Devices and Materials",,,,,,2020,Sept. "伊藤浩之,Li Chao,Korkut Kaan Tokgoz,大橋匠,竹田謙一","アニマルウェルフェア自動評価を目指した牛モニタリングシステムの研究","電子情報通信学会 ソサイエティ大会",,,,,,2020,Sept. "Hiroyuki Ito","Edge-AI Based Cattle Behavior Estimation System for Grazing","The 2020 International Symposium on VLSI Design, Automation and Test",,,,,"p. 36",2020,Aug. "本田優斗,田中佐和子,崔容俊,野田俊彦,高橋一浩,澤田和明,石井仁,町田克之,伊藤浩之,二階堂靖彦,齋藤光正,吉田眞一","フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討","令和2年度E部門総合研究会",,,,,,2020,July "渡邉伊織,石原 昇,伊藤 浩之","インピーダンス変換回路によるRFバックスキャッタリング信号レベルの改善","短距離無線通信研究会",,,,,,2020,June "Yuichiro Yano,Motoaki Hara,Masatoshi Kajita,Shinsuke Hara,Akifumi Kasamatsu,Tetsuya Ido,Hiroyuki Ito,Masaya Toda,Takahito Ono","Micro-Device-Technologies toward Chip Level Integration of Microwave Atomic Clock System","Joint Conference of the IEEE International Frequency Control Symposium & IEEE International Symposium on Applications of Ferroelectrics",,,,,,2020,June "Takashi Ichikawa,Ken Atsumi,Tatsuya Koga,Daisuke Yamane,Shin-ichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes","Design, Test, Integration & Packaging of MEMS/MOEMS",,,,,,2020,June "Kosuke Suzuki,Tso-Fu Mark Chang,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample Geometry Effect on Mechanical Property of Gold Micro-Cantilevers by Micro-Bending Test",,"MRS Communications","Materials Research Society","Vol. 20",,"pp. 434-438",2020,May "Kyotaro Nitta,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers",,"Journal of The Electrochemical Society","IOP Science","Vol. 167",,"pp. 082503",2020,Apr. "Kazuya Masu,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Ryo Shigeyama,Taiki Ogata,Yoshihiro Miyake","CMOS-MEMS Based Microgravity Sensor and Its Application",,"ECS Transactions",,"Vol. 97","No. 5","pp. 91-108",2020,Apr. "入谷 友樹,新田京太朗,Yu-An Chien,Tso-Fu Mark Chang,山根 大輔,伊藤 浩之,町田 克之,益 一哉,曽根 正人","Au-Pd合金膜の電気メッキとその機械的特性","第67回応用物理学会春季学術講演会","第67回応用物理学会春季学術講演会",,,,,2020,Mar. "渥美 賢,古賀 達也,市川 崇志,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar. "Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Noboru Ishihara,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing","The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020)",,,,,,2020,Mar. "曽根 正人,Hao-Chun Tang,Tso-Fu Mark Chang,山根 大輔,町田 克之,伊藤 浩之,益 一哉","貴金属めっき材料の結晶組織制御とその医用MEMS デバイスへの応用","日本金属学会 第166回講演大会","日本金属学会 第166回講演大会",,,,,2020,Mar. "Yu-an Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposited High Strength Au-TiO2 Nano Composite Film for MEMS Devices","第67回応用物理学会春季学術講演会","第67回応用物理学会春季学術講演会",,,,,2020,Mar. "市川 崇志,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar. "Ludovico Minati,Tokgoz K.K,Mattia Frasca,Yasuharu Koike,Iannacci J,Natsue Yoshimura,Kazuya Masu,Hiroyuki Ito","Distributed sensing via inductively coupled single-transistor chaotic oscillators: a new approach and its experimental proof-of-concept",,"IEEE Access",,"Vol. 8",,"pp. 36536-36555",2020,Feb. "Motoaki Hara,Yuichiro Yano,Masatoshi Kajita,Shinsuke Hara,Akifumi Kasamatsu,Hiroyuki Ito,Tetsuya Ido","INJECTION LOCKING TYPE 1/2 FREQUENCY DIVIDER EMPLOYING PIEZOELECTRIC MEMS RESONATOR FOR SIMPLIFYING THE MICRO ATOMIC CLOCK SYSTEM","The 33rd International Conference on Micro Electro Mechanical Systems",,,,,,2020,Jan. "Yi-Lun Yang,Hiroyuki Ito,Kim Youngsuk,Takayuki Ohba,Kuan-Neng Chen","Evaluation of Metal/Polymer Adhesion and Highly Reliable Four-Point Bending Test Using Stealth Dicing Method in 3D Integration",,"IEEE Transactions on Components, Packaging and Manufacturing Technology",,,,,2020,Jan. "Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability","IEEE Sensors 2019","IEEE Conference Paper","2019 IEEE SENSORS",,,,2020,Jan. "Ludovico Minati,Hiroyuki Ito,Alessio Perinelli,Leonardo Ricci,Luca Faes,Natsue Yoshimura,Yasuharu Koike,Mattia Frasca","Connectivity Influences on Nonlinear Dynamics in Weakly-Synchronized Networks: Insights From Rossler Systems, Electronic Chaotic Oscillators, Model and Biological Neurons",,"IEEE Access","IEEE","Vol. 7",,"pp. 174793 - 174821",2019,Dec. "Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method","MRS Fall Meeting 2019",,,,,,2019,Dec. "Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film","MRS Fall Meeting 2019",,,,,,2019,Dec. "古賀 達也,市川 崇志,田中 直登,緒方 大樹,大良 宏樹,山根 大輔,石原 昇,伊藤 浩之,曽根 正人,町田 克之,三宅 美博,益 一哉","微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討","第11回集積化MEMSシンポジウム",,,,," 19pm4-A-3",2019,Nov. "市川 崇志,乙部 翔太,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","3Dピラー型Au錘MEMS加速度センサ","第36回「センサ・マイクロマシンと応用システム」シンポジウム",,,,," 19am3-PS3-21",2019,Nov. "市川 崇志,古賀 達也,山根 大輔,飯田 慎一,石原 昇,伊藤 浩之,Chang Tso-Fu Mark,曽根 正人,町田 克之,益 一哉","積層メタル技術で作製したMEMS加速度センサの衝撃特性評価","第11回集積化MEMSシンポジウム",,,,," 19pm4-A-4",2019,Nov. "Kosuke Ono,Sangyeop Lee,Minoru Fujishima,Hiroyuki Ito,Shuhei Amakawa","Millimeter-wave CMOS amplifier with negative-capacitance feedback using half-wave transformer","International Symposium on Biomedical Engineering",,,,,,2019,Nov. "原基揚,矢野雄一郎,梶田雅稔,原紳介,笠松章史,伊藤浩之,井戸哲也","Injection-Lock-Type BAW Oscillator Aiming for Self-Oscillating Atomic Clock","超音波エレクトロニクスの基礎と応用に関するシンポジウム",,,,,,2019,Nov. "伊藤浩之","牛行動推定のためのEdge AI技術開発","デザインガイア2019",,,,,,2019,Nov. "伊藤浩之,古賀達也,市川崇志,山根大輔,石原昇,三宅美博,町田克之,益一哉","兆し計測のための高感度MEMS加速度センサ技術","計測自動制御学会 システム・情報部門 学術講演会 2019",,,,,,2019,Nov. "Tatsuya Koga,Takashi Ichikawa,Naoto Tanaka,Taiki Ogata,Hiroki Ora,Daisuke Yamane,Noboru Ishihara,Hiroyuki Ito,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds","IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019)","IEEE Conference Paper","IEEE",,,,2019,Oct. "Motoaki Hara,Yuichiro Yano,Masatoshi Kajita,Shinsuke Hara,Akifumi Kasamatsu,Masaya Toda,Hiroyuki Ito,Takahito Ono,Tetsuya Ido","Drift-free FBAR oscillator using an atomic-resonance-stabilization technique","The 2019 IEEE International Ultrasonics Symposium",,,,,,2019,Oct. "Tso-Fu Mark Chang,Yu-An Chien,Hao-Chun Tang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept. "奥村歩加,黄 宸佑,齋藤 直彦,戸田和宏,松島宏明,伊藤浩之,浅川 純子,竹田謙一","放牧牛の行動予測に必要なデータのサンプリング間隔がノルム波形に及ぼす影響",,,,,,,2019,Sept. "原紳介,董鋭冰,松本 敦,笠松章史,伊藤浩之,関根 かをり,成瀬 誠","超高速意思決定に向けたシリコンCMOS高速履歴記憶の回路設計","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept. "市川 崇志,乙部 翔太,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,曽根 正人,益 一哉","Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept. "Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Metals","MDPI","Vol. 9","No. 9","pp. 987",2019,Sept. "Kyotaro Nitta,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Au-Cu alloy/Ti Layered micro-cantilevers toward MEMS Movable Components","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials",,,,"p. 46",2019,Sept. "Hitomi Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Dependence Structure Stability of Ti/Au Layered Micro-Cantilevers","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials",,,,"p. 45",2019,Sept. "Hitomi Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "Kyotaro Nitta,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept. "T. Washio,M. Saijo,H. Ito,K. Takeda,T. Ohashi","Development of a theoretical model to explain consumers’ willingness to purchase animal welfare products in Japan","53rd Congress of the International Society for Applied Ethology (ISAE2019)","Proceedings of the 53rd Congress of the International Society for Applied Ethology (ISAE2019)",,,,"p. 305",2019,Aug. "市川 崇志,新島 宏文,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","3軸Au錘MEMS加速度センサにおける検出電極構造の検討","令和元年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 67-72",2019,July "Katsuyuki Machida,Daisuke Yamane,Toshifumi Konishi,Shin-ichi Iida,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Hiroyuki Ito,Kazuya Masu","MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology",,"ECS Transactions",,"Vol. 92",,"pp. 169-184",2019,July "Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","A MEMS Accelerometer for Sub-mG Sensing",,"Sensors and Materials",,"Vol. 31","no. 9","pp. 2883-2894",2019,July "Keisuke Asano,Tso-Fu Mark Chang,Hao-Chun Tang,Takashi Nagoshi,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components",,"ECS Journal of Solid State Science and Technology",,"Vol. 8","No. 8","pp. P412-P415",2019,July "H. Ito,N. Saito,C. Huang,S. Hata,A. Okumura,K. Toda,H. Matsushima,J. Asakawa,L. Chao,T. Ohashi,K. Takeda","Development Scheme for Cattle Behavior Estimation by Deep Learning in an Edge Device","The second International Conference on Precision Dairy Farming","Proceedings of the 2nd International Precision Dairy Farming Conference",,,,"p. 87",2019,June "Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices",,"Microelectronic Engineering",,"Vol. 213",,"pp. 13-17",2019,May "Kyotaro Nitta,Tso-Fu Mark Chang,Koichiro Tachibana,Hao-chun Tang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test",,"Microelectronic Engineering",,"Vol. 215",,"pp. 111001",2019,May "Ken Atsumi,Shota Otobe,Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers","Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)","IEEE Conference Paper","IEEE",,,,2019,May "Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May "Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May "Masato Sone,Hao-Chun Tang,Masaharu Yoshiba,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Mechanical properties of electrodeposited gold-copper alloy by micro-compression test","The 2nd International Conference on Material Strength and Applied Mechanics","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,2019,May "Yi-Lun Yang,Jia-Ling Liu,Guan Wei Chen,Shoichi Kodama,Kyosuke Kobinata,Kuan-Neng Chen,Hiroyuki Ito,Kim Youngsuk,Takayuki Ohba","Highly Reliable Four-Point Bending Test Using Stealth Dicing Method for Adhesion Evaluation","International Conference on Electronics Packaging",,,,,"pp. 28-31",2019,Apr. "Ludovico Minati,Mattia Frasca,Natsue Yoshimura,Leonardo Ricci,Pawe? O?wiecimka,Yasuharu Koike,Kazuya Masu,Hiroyuki Ito","Current-starved cross-coupled CMOS inverter rings as versatile generators of chaotic and neural-like dynamics over multiple frequency decades",,"IEEE Access","IEEE","Vol. 7",,"pp. 54638 - 54657",2019,Apr. "市川 崇志,新島 宏文,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","3軸Au錘MEMS加速度センサにおける平行平板型電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "大島佑太,安藤幹,平川顕二,岩瀬正幸,小笠原宗博,依田孝,石原昇,伊藤浩之","TID影響下におけるMOSFETの動的特性劣化モデルの開発","第66回 応用物理学会春季学術講演会",,,,,,2019,Mar. "安藤幹,大島佑太,平川顕二,岩瀬正幸,小笠原宗博,依田孝,石原昇,伊藤浩之","CMOS論理回路におけるTIDの影響評価","2019年 電子情報通信学会総合大会",,,,,,2019,Mar. "新田 京太朗,Tang Haochun,Chen Chun-Yi,Chang Tso-Fu Mark,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","電気めっき法によるAu-Cu合金微小カンチレバーの作製","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "鈴木 康介,Ken Hashigata,浅野 啓介,Chun-Yi Chen,名越 貴志,Tso-Fu Mark Chang,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","微小曲げ試験による金材料の機械的強度のサンプル形状効果","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "乙部 翔太,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","Au錘3軸MEMS加速度センサのためのSCD電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "渡邊 瞳,鈴木 拓真,Chen Chun-Yi,Chang Tso-Fu Mark,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","Ti/Au微小カンチレバーの温度依存性への積層構造の影響","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "渥美 賢,乙部 翔太,古賀 達也,市川 崇志,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","積層メタル技術によるピラー型容量検出電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar. "Koichiro Tachibana,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test",,"Microelectronic Engineering",,"Volume 207",,"pp. 33-36",2019,Jan. "Shuhei Amakawa,Atsushi Takeshige,Shinsuke Hara,Ruibing Dong,Sangyeop Lee,Takeshi Yoshida,Minoru Fujishima,Kazuya Masu,Hiroyuki Ito","Causal characteristic impedance determination using calibration comparison and propagation constant","IEEE ARFTG Microwave Measurement Conference",,,,,,2019,Jan. "Daisuke Yamane,Shota Otobe,Ken Atsumi,Tatsuya Koga,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS","32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)",,,,,"pp. 684-687",2019,Jan. "Motohiro Takayasu,Ippei Tsuji,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer",,"Sensors and Materials",,"Vol. 30","No. 12","pp. 2919-2926",2018,Dec. "Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","Sub-1mG MEMS Inertial Sensor for Biomedical Applications","The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and Education(ICNERE2018)",,,,,,2018,Nov. "Hiroyuki Ito","Ultra-Low Power RF Circuit Technologies for IoT","4th World Research Hub Initiative Workshop on Asian Industry Highway",,,,,,2018,Nov. "Shota Otobe,Tatsuya Koga,Ken Atsumi,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Hiroyuki. Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes","31st International Microprocesses and Nanotechnology Conference (MNC2018)",,,,,,2018,Nov. "乙部 翔太,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ","第10回集積化MEMSシンポジウム",,,,,,2018,Oct. "原基揚,矢野雄一郎,梶田雅稔,西野仁,戸田雅也,原紳介,笠松章史,伊藤浩之,小野崇人,井戸哲也","圧電薄膜共振子を利用した3.5 GHz帯CMOS発振回路の開発 と原子時計システムへの適用","「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2018,Oct. "Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone.","Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct. "原基揚,矢野雄一郎,梶田雅稔,原紳介,笠松章史,伊藤浩之,井戸哲也","Rb時計周波数の直接発振を目的としたFBAR-VCOの開発","超音波エレクトロニクスの基礎と応用に関するシンポジウム",,,,,,2018,Oct. "市川 崇志,新島 宏文,古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","Au単一錘平行平板型3軸MEMS加速度センサの検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会)",,,,,,2018,Oct. "古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会)",,,,,,2018,Oct. "Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Solid Solution Strengthening of Gold Based Materials for MEMS Applications","The 35th SENSOR SYMPOSIUM on Sensors, Micromachines and Applied Systems",,,,,,2018,Oct. "Motoaki Hara,Yuichiro Yano,Masatoshi Kajita,Hitoshi Nishino,Yasuhiro Ibata,Shinsuke Hara,Masaya Toda,Akifumi Kasamatsu,Hiroyuki Ito,Takahito Ono,Tetsuya Ido","Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock",,"Review of Scientific Instruments",," 89"," 10"," 105002",2018,Oct. "Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology","Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development",,,,,,2018,Sept. "Masato Sone,Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu","EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"",,,,,2018,Sept. "伊藤浩之,鹿島 光司,深水 克郎,永野風矢,大場隆之","密閉型稲水耕栽培装置の試作と評価","農業環境工学関連学会2018年合同大会",,,,,,2018,Sept. "Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Takahiro Yamamoto,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys for Reliability of MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshib,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Keisuke Asano,Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyotaro Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept. "Kazuya Masu,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake","CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease","4th International Conference on Condensed Matter and Materials Physics",,,,,,2018,Aug. "Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyoutarou Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June "Shota Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection","Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)",,,,,,2018,June "Masato Sone,Hao-Chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June "Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June "Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June "HIdeaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,HIroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June "伊藤浩之,山根大輔,小西敏文,道正志郎,石原昇,町田克之,曽根正人,三宅美博,益一哉","MEMS加速度センサと生体計測への応用","新化学技術推進協会 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会",,,,,,2018,May "Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology","13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)",,,,,"pp. WM-II-f3243",2018,Apr. "Motoaki Hara,Yuichiro Yano,Masatoshi Kajita,Shinsuke Hara,Akifumi Kasamatsu,Hiroyuki Ito,Takahito Ono,Tetsuya Ido","FBAR-based 3.4 GHz Oscillator without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip","European Frequency and Time Forum",,,,,,2018,Apr. "伊藤 浩之,?根 ?輔,小西敏文,道正 志郎,?原 昇,町? 克之,曽根 正?,三宅 美博,益 ?哉","集積化CMOS-MEMS技術による?感度慣性センサと応?システム","応用物理学会第65回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar. "宮内 楓,田口 泰地,石川 洋介,伊藤 浩之,道正 志郎,益 一哉,石原 昇","RFバックスキャッタリングによる低電力ワイヤレスセンサ端末モジュールの試作評価結果","2018年 電子情報通信学会総合大会",,,,,,2018,Mar.