"井上敬太,渥美裕樹,西山伸彦,田村茂雄,荒井滋久","SOI基板上多層a-Si細線導波路の伝搬特性の評価",,"第57回応用物理学関係連合講演会",,"Vol. 神奈川","No. 17p-P3-7",,2010,Mar.
"Keita Inoue,Dhanorm Plumwongrot,Nobuhiko Nishiyama,Shinichi Sakamoto,Haruki Enomoto,Shigeo Tamura,Takeo Maruyama,Shigehisa Arai","Loss Reduction of Si Wire Waveguide Fabricated by Edge-Enhancement Writing for Electron Beam Lithography and Reactive Ion Etching Using Double Layered Resist Mask with C60",,"Jpn. J. Appl. Phys.",,"vol. 48","no. 3","p. 030208",2009,Mar.
"Keita Inoue,Dhanorm Plumuwongrot,Nobuhiko Nishiyama,Shinichi Sakamoto,Haruki Enomoto,Shigeo Tamura,Takeo Maruyama,Shigehisa Arai","Loss Reduction of SiWireWaveguide on SOI Substrate Prepared by Parallel Plate RIE using Double Layered Resist Mask with C60","The IEEE Nanotechnology Materials and Devices Conference 2008","IEEE NMDC2008",,,,,2008,Oct.
"Keita Inoue,Nobuhiko Nishiyama,Haruki Enomoto,Shigeo tamura,Takeo Maruyama,Shigehisa Arai","Evaluation of Si Wire Waveguide Fabricated by Parallel Plate RIE Process using Double Layered EB Resist Containing C60","iNOW 2008","Digest of iNOW2008",,,"No. 3-P24",,2008,Aug.
"井上敬太,プルームウォンロート･タノーム,西山伸彦,阪本真一,榎本晴基,田村茂雄,丸山武男,荒井滋久","C60含有と非含有EBレジストZEPの重ね塗りによるSi導波路ドライエッチング形状の向上","第55回応用物理学関係連合講演会","第55回応用物理学関係連合講演会","応用物理学会","Vol. 千葉","No. 29p-ZG-15",,2008,Mar.
"プルームウォンロート・タノーム,小沢浩二,黒川宗高,田村茂雄,丸山武男,西山伸彦,荒井滋久","低温現像によるGaInAsP/InP量子細線構造の線幅ばらつきの低減","第55回応用物理学関係連合講演会","第55回応用物理学関係連合講演会","応用物理学会","Vol. 千葉","no. 28p-E-18",,2008,Mar.
"S. Sakamoto,Y. Nishimoto,S. Tamura,T. Maruyama,N. Nishiyama,S. Arai","Strongly Index-Coupled Membrane BH-DFB Lasers With Surface Corrugation Grating",,"IEEE J. Select. Top. in Quantum Electron.","IEEE","vol. 13","no. 5","pp. 1135-1141",2007,Sept.
"Takeo Maruyama,Tadashi Okumura,Masaki Kanemaru,Shinichi Sakamoto,shigeo tamura,SHIGEHISA ARAI","Thermal characteristics of GaInAsP/InP membrane DFB lasers on SOI substrate integrated with rib-waveguide",,"The 12th Opto-Electronics and Communications Conference",,"  12D1-3",,,2007,July
"Tadashi Okumura,Takeo Maruyama,Masaki Kanemaru,Shinichi Sakamoto,shigeo tamura,SHIGEHISA ARAI","Fundamental-mode operation of GaInAsP/InP membrane DFB lasers bonded on SOI substrate and its waveguide integration",,"The 19th Indium Phosphide and Related Material",,"  TuB2-2",,,2007,May
"賈学英,小島隆,早船嘉典,田村茂雄,渡辺正裕,荒井滋久","近接効果補正露光による量子細線構造のサイズ揺らぎの低減","第44回応用物理学会関係連合講演会",,,"  29a-X-4","  2","  586",1997,Mar.