"Sakuchi Osamu,Iizuka Naoya,Jiang Fei,Watanabe Masato,Kawamura Tohru,Okino Akitoshi,Horioka Kazuhiko,Hotta Eiki","Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography","The 25th Symposium on Plasma Processing (SPP-25)",,,,,,2008,Jan. "MASATO WATANABE,Nozomu Kishi,Naoya Iizuka,Shinya Orishimo,Fei Jiang,AKITOSHI OKINO,EIKI HOTTA","Optical Observation of Gas Jet Z-Pinch Discharge Produced Extreme Ultraviolet Light Source","16th IEEE International Pulsed Power Conference",,"IEEE",,,"pp. 1679-1682",2007,Nov. "Šέ–],”Ρ’Λ’ΌΖ,β–{•q˜Y,‘vmα©,¬—Ρ–υ“T,S.R. Mohanty,“n•Σ³l,‰«–μWr,–x“c‰hŠμ","“―Ž²“ρdƒmƒYƒ‹Œ^“d‹Ι‚π—p‚’‚½EUVŒυŒΉ‚̏o—Ν“Α«","•½¬‚P‚W”N“d‹CŠw‰οŠξ‘bEή—ΏE‹€’Κ•”–ε‘ε‰ο","•½¬‚P‚W”N“d‹CŠw‰οŠξ‘bEή—ΏE‹€’Κ•”–ε‘ε‰οiCD-ROM)",,,,"pp. 259",2006,Aug. "S.R.Mohanty,T.Sakamoto,Y.Kobayashi,Naoya Iizuka,Nozomu Kishi,MASATO WATANABE,Tohru Kawamura,AKITOSHI OKINO,KAZUHIKO HORIOKA,E.Hotta","Influence of electrode separation and gas curtain on extreme ultraviolet emission of a gas jet z-pinch source",,"Applied Physics Letters",,"Vol. 89","No. 4","pp. 041502-1?3",2006,July "Naoya Iizuka,Toshiro Sakamoto,Yasunori Kobayashi,Inho Song,Smruti R. Mohanty,Masato Watanabe,AKITOSHI OKINO,Eiki Hotta","Optimization of a gas jet-type Z-pinch discharge EUV light source","•½¬18”N“x“ϊ–{•ͺŒυŠw‰οt‹Gu‰‰‰οEƒVƒ“ƒ|ƒWƒEƒ€",,"“ϊ–{•ͺŒυŠw‰ο",,,,2006,May