"Majid Masnavi,Mitsuo Nakajima,Akira Sasaki,Eiki Hotta,Kazuhiko Horioka","Does lithium plasma in discharge-based extreme ultraviolet sources produce the necessary power for lithography?","2007 International EUVL Symposium",,"SEMATECH",,,"pp. SO-P10",2007,Oct.
"Majid Masnavi,Mitsuo Nakajima,Eiki Hotta,Kazuhiko Horioka,Gohta Niimi,Akira Sasaki","Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources",,"Journal of Applied Physics","American Institute of Physics","Vol. 101","No. 3","pp. 033306 1-9",2007,Feb.
"majid masnavi,MITSUO NAKAJIMA,Akira Sasaki,Eiki Hotta,KAZUHIKO HORIOKA","Approach to optimize conversion efficiency of discharge-pumped plasma extreme ultraviolet sources",,"Applied Physics Letters",,"Vol. 87","No. 11","pp. 111502-1?111502-4",2005,Sept.
"majid masnavi,MITSUO NAKAJIMA,Akira Sasaki,Eiki HOTTA,KAZUHIKO HORIOKA","Characteristics of Extreme Ultraviolet Radiation Conversion Efficiency of Xenon Plasma",,"Jpn.J.Appl.Phys.",,"Vol. 43","No. 12","pp. 8285-8291",2004,Dec.