"Yutaka Tanaka,Masafumi EBISAWA,Shinichi Yokota,Kazuya Edamura","Miniaturized and High]Powered Micro Pump Using Functional Fluid ECF","12th International Conference on Mechatronics Technology (ICMT 2008).","12th International Conference on Mechatronics Technology (ICMT 2008).",,,,,2008,Oct.