"¯–쌛•¶,’†ì‹±¬,–약”ŽŽi,Žº —²Œj”V,‰Á“¡ —LŽq,b”ã—²s,‹à¬‘,ƒp[ƒ‹ƒnƒbƒgƒAƒwƒƒg,Šp“ˆ–M”V,…–앶“ñ,–؉º –L•F,“›ˆäˆê¶,•ž•”Œ’—Y,Šâˆä—m","Œõ“dŽq•ªŒõ‚É‚æ‚éSi’†As‚̉»ŠwŒ‹‡ó‘Ô•]‰¿","‘æ56‰ñ‰ž—p•¨—ŠwŠÖŒW˜A‡u‰‰‰ï","‘æ56‰ñ‰ž—p•¨—ŠwŠÖŒW˜A‡u‰‰‰ï—\eW","‰ž—p•¨—Šw‰ï",,"No. 2","pp. 883",2009,Mar. "’†ì‹±¬,–약”ŽŽi,ŽðˆäˆêŒ›,‰¡“c ’m”V,b”ã —²s,‹à¬‘,ƒp[ƒ‹ƒnƒbƒgƒAƒwƒƒg,Šp“ˆ–M”V,…–앶“ñ,•ž•”Œ’—Y,“›ˆäˆê¶,Šâˆä—m","Œõ“dŽq•ªŒõ‚É‚æ‚éSi’†As‚ÌŠˆ«‰»ó‘Ô‚Ì[‚³•ûŒü•ª•z•]‰¿","H‹G‘æ69‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï","‰ž—p•¨—Šw‰ï","‰ž—p•¨—Šw‰ï",,"No. 2","pp. 738",2008,Sept. "Kazuo Tsutsui,Masamitsu Watanabe,Yasumasa Nakagawa,Kazunori Sakai,Takayuki Kai,Cheng-Guo Jin,Yuichiro Sasaki,Kuniyuki Kakushima,Parhat Ahmet,Bunji Mizuno,Takeo Hattori,Hiroshi Iwai.","Profiling of Carrier Properties for Shallow Junctions Using a New Sub-nanometer Step-by-step Etching Technique","The 8th International Workshop on Junction Technology (IWJT2008)",,,,,,2008,May