"Mitsuru Nakata,Kazushige Takechi,Shinya Yamaguchi,Eisuke Tokumitsu,Hiroshi Tanabe,Setsuo Kaneko","Low-Temperature Fabrication of Amorphous InGaZnO4 Thin-Film Transistors Utilizing Excimer","LaserInternational Workshop on Transparent Amorphous Oxide Semiconductors(TAOS 2010)",,,,,,2010,Jan.