"Akira Uedono,KAZUO TSUTSUI,Shoji Ishibashi,Hiromichi Watanabe,Shoji Kubota,Kazuki Tenjinbayashi,Yasumasa Nakagawa,Bunji Mizuno,takeo hattori,HIROSHI IWAI","Vacancy-Type Defects in Ultra-Shallow Junctions Fabricated Using Plasma Doping Studied by Positron Annihilation","IEEE IWJT 2010 Extended Abstracts 2010 International Workshop on Junction Technology",,,,,,2010,May