"Toshifumi Konishi,Satoshi Maruyama,Takaaki Matsushima,Makoto Mita,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Hiroyuki Fujita,Hiroshi Toshiyoshi","A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS","2010 International Conference on Solid State Devices and Materials","Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials","2010 International Conference on Solid State Devices and Materials",,,"pp. 1158-1159",2010,Sept.