"Šp“ˆ–M”V,¬–φ—Fν,—ˆŽR‘ε—S,K“c‚έ‚δ‚«,‘vέ—σ,²“‘‘nŽu,μ“ίŽq‚’¨,M. ƒ}ƒCƒ}ƒCƒeƒB,ŠΪŠμˆκ,M.K. Bera,ƒp[ƒ‹ƒnƒbƒgƒAƒwƒƒg,–μ•½”ŽŽi,“›ˆδˆκΆ,ΌŽR²,™ˆδM”V,–ΌŽζŒ€“ρ,•ž•”Œ’—Y,ŽR“cŒ[μ,Šβˆδ—m","LaCe ƒVƒŠƒP[ƒg–Œ‚π—p‚’‚½EOT<0.7nm ‚Μ’ΌΪΪ‡ high-k/Si ‚ΜŽΐŒ»‚Ζƒtƒ‰ƒbƒgƒoƒ“ƒh“dˆ³§Œδ","‰ž—p•¨—Šw‰ο•ͺ‰Θ‰ο ƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[","C–μ•½”ŽŽiC“›ˆδˆκΆCΌŽR²C™ˆδM”VC–ΌŽζŒ€“ρC•ž•”Œ’—YCŽR“cŒ[μCŠβˆδ—mgLaCe ƒVƒŠƒP[ƒg–Œ‚π—p‚’‚½EOT<0.7nm ‚Μ’ΌΪΪ‡ high-k/Si ‚ΜŽΐŒ»‚Ζƒtƒ‰ƒbƒgƒoƒ“ƒh“dˆ³§Œδh ‰ž—p•¨—Šw‰ο•ͺ‰Θ‰ο ƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[ No.127 pp.4-8i2010”N7ŒŽ22“ϊ j",,,"No. 127","pp. 4-8",2010,July