"A. Matsutani,K. Nishioka,M. Sato,D. Shoji,D. Kobayashi,T. Isobe,A. Nakajima,T. Tatsuma,S. Matsushita","Angled Etching of (001) Rutile Nb-TiO2 Substrate by SF6 Based Capacitive Coupled Plasma",,,,"Vol. 53",,"pp. 06JF02",2014, "Kenji Ohmori,W. Feng,Soshi Sato,R. Hettiarachchi,M. Sato,T. Matsuki,Kuniyuki KAKUSHIMA,HIROSHI IWAI,Keisaku Yamada","Direct Real-Time Observation of Channel Potential Fluctuation, Correlated to Random Telegraph Noise of Drain Current Using Nanowire MOSFETs with Four-Probe Terminals","2011 Symposium on VLSI Technology",,,,,,2011,