"¬Ό•q•Ά,ŠΫŽR’qŽj,ŽO“cM,ŽRͺ‘ε•γ,ˆΙ“‘_”V,’¬“cŽ”V,ΞŒ΄ Έ,‰vˆκΖ,“‘“c”Ž”V,”N‹g —m","ƒn[ƒhƒEƒFƒA‹LqŒΎŒκ‚π—p‚’‚½WΟ‰»CMOS-MEMS“‡έŒv‹Zp","‰ž—p•¨—Šw‰οEWΟ‰»MEMS‹ZpŒ€‹†‰οŽεΓ‘ζ4‰ρWΟ‰»MEMSƒVƒ“ƒ|ƒWƒEƒ€",,,,,,2012,Oct.
"¬Ό •q•Ά,ŠΫŽR ’qŽj,Ό“‡ —²–Ύ,ŽO“c M,’¬“c Ž”V,ˆΙ“‘ _”V,ΞŒ΄ Έ,‰vˆκΖ,“‘“c ”Ž”V,”N‹g —m","WΟ‰» CMOSCMOS--MEMSMEMS ‚Μ‚½‚ί‚Μ“‡έŒv‹Zp“‡έŒv‹Zp‚ΜŒŸ“’ (2)","‘ζ 72 ‰ρ‰ž—p•¨—Šw‰οŠwpu‰‰‰ο","‘ζ 72 ‰ρ‰ž—p•¨—Šw‰οŠwpu‰‰‰ο u‰‰—\eW(2011 H ŽRŒ`‘εŠw) 30a-E-14","‰ž—p•¨—Šw‰ο",,,"p. 22-014",2011,Aug.