"T. Sato,S. Nabeya,M. Vivek,T. Ishida,R. Kometani,H. Fujita","Real time observation of slipping and rolling events in DLC wear nanoparticles",,"Nanotechnology","Institute of Physics","Vol. 29",,,2018,June "Minoru Egawa,Tadashi Ishida,Laurent Jalabert,Hiroyuki Fujita","In-situ realtime monitoring of nanoscale gold electroplating using micro-electro-mechanical systems liquid cell operating in transmission electron microscopy",,"Applied Physics Letters","American Institute of Physics","Vol. 108",,,2016,Jan. "Kazuhiro Takahashi,Makoto Mita,Muneki Nakada,Daisuke Yamane,Akio Higo,Hiroyuki Fujita,Hiroshi Toshiyoshi","Development of Multi-user Multi-chip SOI CMOS-MEMS Process","IEEE MEMS",,,,,,2015,Jan. "Daisuke Yamane,Harunobu Seita,Winston Sun,Shigeo Kawasaki,Hiroyuki Fujita,Hiroshi Toshiyoshi","A 12-GHz DPDT RF MEMS Switch with Layer-wise Waveguide/Actuator Design Technique","IEEE MEMS",,,,,,2015,Jan. "Yuki Takayama,Tadashi Ishida,Takaaki Sato,Laurent Jalabert,Hiroyuki Fujita","Study of Viscous Deformation of SiO2 by Nanoscale Tensile Test under In-situ Observation","28th International Microprocesses and Nanotechnology Conference",,,,,,2014,Nov. "T. Ishida,Takaaki Sato,Masatsugu Oguma,Takahiro Ishikawa,Noriaki Itamura,Keisuke Goda,Naruo Sasaki,H. Fujita","Time-lapse Nanoscopy of Friction in the non-Amonton and non-Coulomb Regime",,"Nano Letters","American Chemical Society","Vol. 15",,"pp. 1475-1480",2014,Oct. "Yang-Che Chen,Tadashi Ishida,Hiroshi Toshiyoshi,Rongshun Chen,Hiroyuki Fujita","Spontaneous oscillation due to electrical charging effect in MEMS electrostatic switches",,"IEEJ Transactions on Sensors and Micromachines","IEEJ","Vol. 134",,"pp. 338-349",2014,June "佐藤隆昭,石田忠,藤田博之","“見る”は”知る”につながる!摩擦界面のその場観察",,"高分子","高分子学会","Vol. 63",,"pp. 299-300",2014,May "山根 大輔,サン ウィンストン,川崎 繁男,藤田 博之,年吉 洋","水平駆動型MEMS導波路の静電駆動時における高周波特性の評価手法",,"電子情報通信学会論文誌C(エレクトロニクスソサエティ)",,"Vol. J97-C","No. 1","pp. 37-45",2014,Jan. "Tadashi Ishida,Hiroyuki Fujita","MEMS-in-TEM for Characterization of Material at the Nanoscale","26th International Microprocesses and Nanotechnology Conference",,,,,,2013,Nov. "Masatsugu Oguma,Takahiro Ishikawa,Noriaki Itamura,Tadashi Ishida,Hiroyuki Fujita,Naruo Sasaki","Shear and Fracture of Single Real Contact Region of Si Under High Pressure","ACSIN-12&ICSPM21",,,,,,2013,Nov. "Takaaki Sato,Tadashi Ishida,Shinsuke Nabeya,Laurent Jalabert,Hiroyuki Fujita","MEMS combined with TEM Setup for Nanotribology","The 23rd ASME Annual Conference on Information Storage and Process Systems",,,,,,2013,June "鍋屋信介,石田忠,佐藤隆昭,藤田博之","MEMSを用いたマイクロスケールPTFE摩擦界面のSTEMその場観測及び摩擦力計測","トライボロジー会議2013春",,,,,,2013,May "Tadashi Ishida,Kuniyuki Kakushima,Hiroyuki Fujita","Degradation Mechanisms of Contact Point during Switching Operation of MEMS Switch",,"JOURNAL OF MICROELECTROMECHANICAL SYSTEMS","IEEE","Vol. 22",,"pp. 828-834",2013,Mar. "藤田博之,石田忠,佐藤隆昭,佐々木成朗","MEMS-in-TEMによるナノ接合の破壊、熱伝導、固相拡散の「その場」観察","本学術会議 計測連合シンポジウム 先端計測2013",,,,,,2013,Mar. "小熊将嗣,石川貴大,板村賢明,石田忠,藤田博之,佐々木成朗","Si対向探針で形成された単一真実接触部のせん断破壊過程","第127回表面技術協会講演大会",,,,,,2013,Mar. "嘉山 由佑子,石田忠,板村賢明,藤田博之,佐々木成朗","シリコンナノ接合の繰り返しせん断破壊過程","第127回表面技術協会講演大会",,,,,,2013,Mar. "石田忠,佐藤隆昭,藤田博之","MEMSを用いたナノスケール摩擦海面観察と同時機械特性評価",,"トライボロジスト",,"Vol. 58","No. 2","pp. 91-96",2013,Feb. "石田忠,藤田博之","MEMS対向針を用いたナノスケール接触・分離試験のTEMその場観察","第32回表面科学学術講演会",,,,,,2012,Nov. "益一哉,町田克之,年吉洋,江刺 正喜,藤田博之,石田誠,田中 秀治,高橋 一浩,越田信義,小山 英樹,佐々木 実,秦誠一,橋口 原,高尾 英邦,永瀬 雅夫,山口 浩司,北澤 正志,前中 一介,澤田和明,柴崎 一郎,野村聡,竹内 幸裕,柴田 英毅,楢崎 祥一,鈴木 雄二,西岡 泰城,森村 浩季,日暮 栄治,千野 満,内山 直己,足立 秀喜,井上 晴伸,橋本 秀樹","異種機能デバイス集積化技術の基礎と応用?MEMS, NEMS, センサ, CMOSLSIの融合?",,"異種機能デバイス集積化技術の基礎と応用?MEMS, NEMS, センサ, CMOSLSIの融合?","株式会社 シーエムシー出版",,,,2012,Nov. "Takaaki Sato,Tadashi Ishida,Laurent Jalabert,Hiroyuki Fujita","Real-time transmission electron microscope observation of nanofriction at a single Ag asperity",,"Nanotechnology","IOP","Vol. 23",,,2012,Nov. "Yuki Takayama,Hiroyuki Fujita,Tadashi Ishida","Electrical Measurement of ITO Nanowire with In-Situ TEM Observation","第29回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2012,Oct. "小西敏文,丸山智史,三田信,山根大輔,伊藤浩之,町田克之,石原 昇,益一哉,藤田博之,年吉 洋","ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct. "Minoru Egawa,Tadashi Ishida,Hiroyuki Fujita","MEMS Liquid TEM Cell for Real-Time Observation of Gold Electroplating","第29回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2012,Oct. "山根 大輔,サン ウィンストン,川崎 繁男,藤田 博之,年吉 洋","エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用",,"電子情報通信学会論文誌C(エレクトロニクスソサエティ)",,"Vol. J95-C","No. 10","pp. 219-227",2012,Oct. "山根大輔,サン ウィンストン,川崎 繁男,藤田 博之,年吉 洋","エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用",,"電子情報通信学会論文誌C(エレクトロニクスソサエティ)",,"Vol. J95-C","No. 10","pp. 219-227",2012,Oct. "Toshifumi Konishi,Satoshi Maruyama,Makoto Mita,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Hiroyuki Fujita,Hiroshi Toshiyoshi","A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language","2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)",,,,,,2012,Sept. "Laurent Jalabert,Takaaki Sato,Tadashi Ishida,Guillou Herve,Minoru Egawa,Shinsuke Nabeya,Yuki Takayama,Sebastian Volz,Hiroyuki Fujita","Toward a Lab-in-a-TEM by mounting advanced-MEMS in TEM holder","38th International conference on Micro and Nano Eengineering",,,,,,2012,Sept. "Hiroyuki Fujita,Tadashi Ishida,Takaaki Sato,Naruo Sasaki,Fabrizio Cleri","Material Testing at Nanoscale with in-situ TEM Observation","Japan-Korea Joint Seminar on micro・nano technology",,,,,,2012,Sept. "Tadashi Ishida,Takaaki Sato,Hiroyuki Fujita","In-situ Observation of Shear Deformation of Gold Single Real Contact Point at the Nanoscale",,"Tribology Online",,"Vol. 7",,"pp. 127-131",2012,Sept. "Tadashi Ishida,Kuniyuki KAKUSHIMA,Teruyasu Mizoguchi,Hiroyuki Fujita","Role of dislocation movement in the electrical conductance of nanocontacts",,"Scientific Reports","Nature publishing group","Vol. 2",,,2012,Sept. "朴鍾?,高間信行,藤田博之,金範?","面基板上の三次元マイクロパターニング及び,円柱形ポリマースタンプ製作への応用",,"電気学会論文誌E(センサ・マイクロマシン部門誌)",,"vol. 132","no. 9","pp. 303?308",2012,Sept. "Laurent Jalabert,Takaaki Sato,Tadashi Ishida,Hiroyuki Fujita","Ballistic Thermal Conductance of a Lab-in-a-TEM Made Si Nanojunction",,"Nano Letters","American Chemical Society","Vol. 12",,"pp. 5213-5217",2012,Sept. "Masataka Usami,Tadashi Ishida,Momoko Kumemura,Laurent Jalabert,Collard Dominique,Hiroyuki Fujita","Four-Terminal Electrical Measurement of a DNA Molecular Bundle Captured by MEMS Tweezers",,"IEEJ Transactions on Sensors and Micromachines","IEEJ","Vol. 133",,"pp. 98-99",2012,Sept. "Hiroyuki Fujita,Hiroshi Toshiyoshi,Tadashi Ishida","From MEMS-CMOS towards Heterogeneous Integration over Scale","221st ECS Meeting",,,,,,2012,May "Tadashi Ishida,Laurent Jalabert,Hiroyuki Fujita","In-situ observation of formation of eutectic structures between gold and silicon","3rd IEEE Workshop on Low Temperature Bonding for 3D Integration",,,,,,2012,May "Jongho Park,Jacques Fattaccioli,Hiroyuki Fujita,Beomjoon Kim","Fabrication of Aluminum/Alumina Patterns using Localized Anodization of Aluminum",,"International Journal of Precision Engineering and Manufacturing",,"Vol. 13",,"pp. 765-770",2012,May "Jongho Park,Hiroyuki Fujita,Beomjoon Kim","Fabrication of 3D micro structures on nonplanar substrates and its applications for roll micro-contact printing","2012 MRS Spring Meeting & Exhibit",,,,,,2012,Apr. "Jongho Park,Hiroyuki Fujita,Beomjoon Kim","Micro patterning on nonplanar substrates using unconventional photolithographic technique with flexible photomask","24th International Microprocesses and Nanotechnology Conference",,,,,,2011,Oct. "Daisuke Yamane,Winston Sun,Harunobu Seita,Shigeo Kawasaki,Hiroyuki Fujita,Hiroshi Toshiyoshi","A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining",,"IEEE Journal of Microelectromechanical Systems",,"vol. 20","no. 5","pp. 1211-1221",2011,Oct. "山根大輔,Winston Sun,川崎繁男,藤田博之,年吉 洋","SOIレイヤ分離設計によるモノリシックRF-MEMS移相器","第28回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2011,Sept. "小西 敏文,丸山 智史,松島 隆明,三田 信,町田 克之,伊藤 浩之,石原 昇,益一哉,藤田 博之,年吉 洋","集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)","第 72 回応用物理学会学術講演会","第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14","応用物理学会",,,"p. 22-014",2011,Aug. "Jongho Park,Hiroyuki Fujita,Beomjoon Kim","Fabrication of metallic microstructure on curved substrate by optical soft lithography and copper electroplating",,"Sensors and Actuators A-Physical",,"Vol. 168",,"pp. 105-111",2011,July "Jongho Park,Hiroyuki Fujita,Beomjoon Kim","Fabrication of metallic microstructure on curved substrate by optical soft lithography and copper electroplating","The 13th Korean MEMS Conference",,,,,,2011,Apr. "山根 大輔,李 宥憲,藤田 博之,年吉 洋","メッキ金の厚膜マスクによるRF-MEMSコプレーナ導波路の製作",,"電気学会論文誌E(センサ・マイクロマシン部門誌)",,"vol. 131","no. 3","pp. 130-131",2011,Mar. "山根大輔,藤田博之,年吉洋","機能レイヤ分離設計によるSOI RF-MEMS受動素子に関する研究","固体エレクトロニクス・光エレクトロニクス研究会",,,,,,2011,Mar. "朴鍾?,高間信行,藤田博之,Beomjoon Kim","凹面基板上の三次元マイクロパターニング及び,円柱形ポリマースタンプ製作への応用","第28回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2011, "Jongho Park,Hiroyuki Fujita,Beomjoon Kim","Fabrication of metallic microstructure on curved substrate by optical soft lithography and copper electroplating","The 13th Korean MEMS Conference",,,,,,2011, "Daisuke Yamane,Winston Sun,Shigeo Kawasaki,Hiroyuki Fujita,Hiroshi Toshiyoshi","A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design",,"IEICE Electronics Express",,"vol. 7","no. 24","pp. 1785-1789",2010,Dec. "山根大輔,Winston Sun,川崎繁男,藤田博之,年吉 洋","Ku帯デュアルSPDT RF-MEMSスイッチの開発","第27回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2010,Oct. "Daisuke Yamane,Winston Sun,Shigeo Kawasaki,Hiroyuki Fujita,Hiroshi Toshiyoshi","A Ku-Band RF-MEMS Phase Shifter with SOI Double-Side Bulk-Micromachining Design","5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT)",,,,,"pp. 68",2010,July "Jongho Park,Hiroyuki Fujita,Beomjoon Kim","Fabrication of high aspect ratio metallic structure on the curved substrate using flexible mask and copper electroplating","The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology",,,,,,2010,July "Daisuke Yamane,Winston Sun,Harunobu Seita,Shigeo Kawasaki,Hiroyuki Fujita,Hiroshi Toshiyoshi","An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism",,"IEICE Electronics Express",,"vol. 7","no. 2","pp. 80-85",2010,Jan. "Daisuke Yamane,Hiroyuki Fujita,Hiroshi Toshiyoshi,Shigeo Kawasaki","Development of a Dual-SPDT RF-MEMS Switch for Ku-band","IEEE Radio and Wireless Symposium (RWS)",,,,,"pp. 432-435",2010,Jan. "Daisuke Yamane,Kiyotaka Yamashita,Harunobu Seita,Hiroyuki Fujita,Hiroshi Toshiyoshi,Shigeo Kawasaki","A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation","Asia-Pacific Microwave Conference (APMC)",,,,,"pp. 555-558",2009,Dec. "Jongho Park,Jacques Fattaccioli,Hiroyuki Fujita,Beomjoon Kim","Localized anodization of aluminum for the formation of aluminum/alumina patterns","3rd International Conference of Asian Society for Precision Engineering and Nanotechnology",,,,,,2009,Nov. "Winston Sun,Daisuke Yamane,Yuheon Yi,Hiroshi. Toshiyoshi,Hiroyuki Fujita,Kiyotaka Yamashita","A Loaded-Line Phase Shifter Using MEMS Switches","第26回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2009,Oct. "張鋭,山根大輔,藤田博之,年吉 洋","RF-MEMS技術による可変メタマテリアル導波路の設計と試作","電気学会E部門総合研究会(マイクロマシン・センサシステム研究会)",,,,,"pp. 13-17",2009,July "Jongho Park,Jacques Fattaccioli,Nobuyuki Takama,Hiroyuki Fujita,Beomjoon Kim","Localized anodization of aluminum for the formation of aluminum/alumina patterns","3rd International Conference of Asian Society for Precision Engineering and Nanotechnology",,,,,,2009, "David Dubuc,Daisuke Yamane,Zhang Rui,Yuheon Yi,Katia Grenier,Hiroyuki Fujita,Hiroshi Toshiyoshi","Modelling and Design Guidelines of Metamaterial-based Artificial Dielectric for the Miniaturization of Microwave Passive Circuit","Metamaterials' 2008",,,,,,2008,Sept. "山根大輔,Winston Sun,清田 晴信,川崎 繁男,藤田 博之,年吉 洋","導波路/アクチュエータのレイヤ分離構造設計技術によるRF-MEMSスイッチ","平成20年電気学会全国大会",,,,,,2008,Mar. "Daisuke Yamane,Kazuhiro Takahashi,Winston Sun,Harunobu Seita,Shigeo Kawasaki,Hiroyuki Fujita,Hiroshi Toshiyoshi","Microwave Switches by MEMS Technology and their Application to Phase-Shifter","Second Japan-Taiwan Workshop on Future Frequency Control Devices",,,,,,2007,Dec. "Daisuke Yamane,Kazuhiro Takahashi,Winston Sun,Harunobu Seita,Shigeo Kawasaki,Hiroyuki Fujita,Hiroshi Toshiyoshi","RF-MEMS Switches for 5.8 GHz Phase Shifter Application","Int. Workshop on Piezo-devices based on Latest MEMS Technologies",,,,,,2007,Nov. "山根大輔,高橋 一浩,Winston Sun,清田 晴信,川崎 繁男,藤田 博之,年吉 洋","アクティブフェイズドアレイアンテナの移相器応用RF-MEMSスイッチ","平成19年度電気学会センサ・マイクロマシン準部門総合研究会",,,,,,2007,July