"Hiroyuki Yamada,Shiro Hino,Naruhisa Miura,Masayuki Imaizumi,Satoshi Yamakawa,EISUKE TOKUMITSU","Fabrication of 4H-SiC MOSFETs Using Stacked Al2O3 Gate Insulator with Pre-Annealed Al2O3 Buffer Layer","The International Conference on Silicon Carbide and Related Materials 2013",,,,,,2013,Oct. "Eisuke Tokumitsu,Isahaya Yamamura,Shiro Hino,Naruhisa Miura,Masayuki Imaizumi,Hiroaki Sumitani,Tatsuo Oomori","Comparative Study of Metalorganic Chemical Vapour Deposition of HfO2 and Al2O3 Gate Insulators on SiC for Power MOSFET Applications","WoDiM 2012(17th Workshop on Dielectrics in Microelectronics)",,,,,,2012,June "Eisuke Tokumitsu,Akio Ishiguro,Hiroyuki Yamada,Shiro Hino,Naruhisa Miura,Masayuki Imaizumi,Hiroaki Sumitani,Tatsuo Oomori","Al2O3/4H-SiC MOSFETs Fabricated with High-Temperature Nitridation Process","2011 International Conference on Silicon Carbide and Related Materials (ICSCRM 2011)",,,,,"pp. 320",2011,Sept. "–Ψ“cŒ›”V•,“ϊ–μŽj˜Y,ŽO‰Y ¬‹v,‘ςΉ”V,Šέ’J”ŽΊ,“ΏŒυ‰i•γ","H(CH3)2Al‚π—p‚’‚½MOCVD–@SiCŠξ”γ‚Φ‚ΜAl2O3–Œ‚ΜŒ`¬‚ΖAl2O3/SiC MOSFET‚Μ“d‹C“I“Α«•]‰Ώ","‘ζ‚V‚Q‰ρ‰ž—p•¨—Šw‰οŠwpu‰‰‰ο",,,,,,2011,Aug. "ŽR“c‘Χ”V,Ξ•‹Ε•v,“ϊ–μŽj˜Y,ŽO‰Y ¬‹v,‘ςΉ”V,Šέ’J”ŽΊ,“ΏŒυ‰i•γ","Al2O3‘͐ϖŒ‚πƒQ[ƒgβ‰–Œ‚Ι—p‚’‚½SiC-MOSFET‚̍쐻‚Ζ•]‰Ώ","‰ž—p•¨—Šw‰οƒVƒŠƒRƒ“ƒeƒNƒmƒƒW[•ͺ‰Θ‰ο‘ζ‚P37‰ρŒ€‹†W‰οA“dŽqξ•ρ’ʐMŠw‰οƒVƒŠƒRƒ“ή—ΏƒfƒoƒCƒXŒ€‹†‰ο","MŠw‹Z•ρ",,,,"pp. 11-15",2011,July