"Y. Takamura,H. Nitta,R. Ishido,T. Kaneko,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Simulation and fabrication of planar type spiral inductors with facing target sputtered CoFeB-SiO2 magnetic layers","The First International Symposium on Integrated Magnetics 2023 (iSIM 2023)",,,"  CP-15",,,2023,May