"Youhei Miyata,Jun Kanehara,Hiroshi Nohira,Y. Izumi,T. Muro,木下豊彦,パールハットアヘメト,Kuniyuki KAKUSHIMA,KAZUO TSUTSUI,takeo hattori,HIROSHI IWAI","Soft X-ray Photoelectron Spectroscopy Study of Boron Doped on Top Surfaces and Sidewalls of Si Fin Structures","2012 12th International Workshop on Junction Technology(IWJT2012)",,,,,,2012,