"Mina Sato,Mie Tohnishi,Akihiro Matsutani","Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma",,"Sensors and Materials",,"Vol. 36","No. 4","pp. 1319-1328",2024,Apr.
"佐藤美那,遠西美重,松谷晃宏","イオンビーム照射によりアモルファス化したSi表面のXRR測定","第71回応用物理学会春季学術講演会",,,,,,2024,Mar.
"Kazuki Shishikura,Hiroyuki Nabae,Akihiro Matsutani,Mina Sato,Koichi Suzumori","Tetherless IPMC Actuator Integrated with Thin Magnesium Battery Formed by Sputtering","The 2024 16th IEEE/SICE International Symposium on System Integration","Proceedings of the 2024 IEEE/SICE International Symposium on System Integration","IEEE",,,,2024,Jan.
"佐藤 美那,遠西美重,松谷晃宏","Ar+ビーム照射により作製したKOHエッチング用SiマスクのXPS解析","2023年第70回応用物理学会春季学術講演会",,,,,,2023,Mar.
"Mie Tohnishi,Mina Sato,Akihiro Matsutani,Takashi Ubukata,Sachiko Matsushita","Surface Treatment of Polyimide using Solid-source H2O Plasma for Fabrication of Ge Electrode",,"Sensors and Materials",,"Vol. 35","No. 3","pp. 1023-1033",2023,Mar.
"Ryo Tsukui,Masaru Kino,Kodai Yamamoto,Mina Sato,Mie Tohnishi,Akihiro Matsutani,Mikio Kurita","Laboratory demonstration of the birefrigent point-diffraction interferometer wavefront sensor",,"Optics Continuum",,"Vol. 2",,"pp. 382-396",2023,Jan.
"遠西 美重,佐藤美那,松下祥子,松谷晃宏","ポリイミドシート上へスパッタ成膜したCr/Ge電極の固体ソースH?Oプラズマを用いた前処理による低抵抗化","第69回応用物理学会春季学術講演会",,,,,,2022,Mar.
"佐藤美那,遠西美重,松谷晃宏","Ar＋ビーム照射によるSiアモルファスマスクを利用したKOHエッチングによる単一細胞分離プレートとマイクロ流路の作製","第69回 応用物理学会 春季学術講演会",,,,,,2022,Mar.
"Mina Sato,Mie Tohnishi,Akihiro Matsutani","Microfabrication of Si by KOH Etchant Using Etching Mask Amorphized by Ar Ion Beam",,"Sensors and Materials",,"Vol. 34","No. 1",,2022,Jan.
"遠西 美重,佐藤美那,松下祥子,松谷晃宏","固体ソースH?O プラズマを用いて表面処理したポリイミドテープ上のCr/Cu電極の折り曲げ耐久性","第82回応用物理学会秋季学術講演会",,,,,,2021,Sept.
"佐藤美那,遠西美重,松谷晃宏","エッチングマスクとしてAr+イオンビームを照射した 微細マスクパターンを用いたKOH エッチングによるSi の微細加工","第82回 応用物理学会 秋季学術講演会",,,,,,2021,Sept.
"佐藤美那","SiのKOHエッチング用マスクとしてのFIB照射の利用?エッチング時間によるマスク耐性及び三次元構造の作製?","総合技術研究会2021東北大学",,,,,,2021,Mar.
"佐藤美那,松谷晃宏,津久井遼,木野勝,山本広大,栗田光樹夫,長田 哲也","ドライエッチングにより作製したメンブレン構造のNbO薄膜の顕微分光透過率測定とEDX分析","第68回 応用物理学会 春季学術講演会",,,,,,2021,Mar.
"Toshihiko Takeshima,Akihiro Matsutani,Mina Sato,KOICHI HASEBE,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","In-situ Temperature Measurement of Local Photothermal Conversion",,"Chemistry Letters",,"Vol. 49","No. 5","  469-472",2020,Feb.
"松谷晃宏,佐藤美那,遠西美重,藤本 美穂,平野 明子,西沢望,進士忠彦,初澤毅","東京工業大学におけるクリーンルーム統合共用化による 組織的研究支援の推進","研究・イノベーション学会第34回年次学術大会","研究・イノベーション学会第34回年次学術大会講演要旨集",,,,"pp. 245-248",2019,Oct.
"Akihiro Matsutani,Mina Sato,KOICHI HASEBE,Ayako Takada","Microfabrication of Concave Micromirror for Microbial Cell Trapping Using K?hler Illumination by XeF2 Vapor Etching",,"Sensors and Materials",,"Vol. 31","No. 4","pp. 1325?1334",2019,Apr.
"長谷部浩一,佐藤美那,松谷晃宏,竹島利彦,磯部敏宏,中島章,松下祥子","カソード加熱型RIE装置により窒素プラズマ処理したTi薄膜およびバルクTiO2の透過率測定","第66回 応用物理学会 春季学術講演会",,,"  11p-PA2-9",,,2019,Mar.
"竹島 利彦,松谷 晃宏,佐藤 美那,長谷部 浩一,磯部 敏宏,中島 章,松下 祥子","局所光熱変換部のin-situ温度測定の試み","応用物理学会 2019 春",,,,,,2019,Mar.
"松谷晃宏,佐藤美那,長谷部浩一,高田綾子","Siマイクロ凹面鏡とケーラー照明光による酵母細胞の捕獲","第66回 応用物理学会 春季学術講演会",,,"  11p-PA2-10",,,2019,Mar.
"Akihiro Matsutani,Mina Sato,KOICHI HASEBE,Ayako Takada","Microfabrication of Si-based Concave Micromirror Array for Microbial Cell Trapping by XeF2 Vapor Etching","MNC 2018, 31st International Microprocesses and Nanotechnology Conference",,,,,"  16P-11-43",2018,Nov.
"松谷晃宏,佐藤美那,長谷部浩一,高田綾子","XeF2気相エッチングにより製作した 微生物細胞捕獲用Siマイクロ凹面鏡の集光実験","第79回応用物理学会秋季学術講演会",,,,,"  19p-PA2-6",2018,Sept.
"Tomotarou Ezaki,Akihiro Matsutani,Kunio Nishioka,Dai Shoji,Mina Sato,Takayuki Okamoto,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","Surface potential on gold nanodisc arrays fabricated on silicon under light irradiation",,"Surface Science",,"Vol. 672-673",,"pp. 62?67",2018,June
"三田 真衣,松谷 晃宏,西岡 國生,佐藤 美那,磯部 敏宏,中島 章,松下 祥子","金属コーティングシリカ球ピラミッドアレイの作製とその光学特性","第65回応用物理学会春季学術講演会",,,,,,2018,Mar.
"松谷晃宏,西岡國生,佐藤美那","XeF2気相エッチングによるSi マイクロ凹面鏡構造の製作","第65回応用物理学会春季学術講演会","第65回応用物理学会春季学術講演会 講演予稿集",,,"  17p-P2-10","p. 01-022",2018,Mar.
"江崎 智太郎,松谷 晃宏,西岡 國生,庄司 大,佐藤 美那,岡本 隆之,磯部 敏宏,中島 章,松下 祥子","プラズモン共鳴により生じる金属ナノ構造体の表面電位差の測定","第63回応用物理学会春季学術講演会",,,,,,2017,Mar.
"Tsuyoshi Takahashi,Akihiro Matsutani,Dai Shoji,Kunio Nishioka,Mina Sato,Takayuki Okamoto,Tomotarou Ezaki,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","Optical performance of Au hemispheric sub-microstructure on polystyrene quadrumer",,"Colloids. Surf. A.",,"Vol. 513",,"pp. 51-56",2017,Jan.
"江崎 智太郎,松谷 晃宏,西岡 國生,庄司 大,佐藤 美那,岡本 隆之,磯部 敏宏,中島 章,松下 祥子","Si/SiO2上金ナノ円盤の表面電位の光照射依存およびその構造依存性","第77回応用物理学会秋季学術講演会",,,,,,2016,Sept.
"Akihiro Matsutani,Kunio Nishioka,Mina Sato","Energy dispersive X-ray spectroscopy analysis of Si sidewall surface etched by deep-reactive ion etching",,"Japanese Journal of Applied Physics",,"vol. 55",,"p. 06GH05",2016,Apr.
"西岡國生,佐藤美那,松谷晃宏","Deep-RIEにより形成されたトレンチ側面の化学組成に関するプラズマ発光分光分析からの考察","第63回応用物理学会春季学術講演会",,,,,"  21a-P3-11",2016,Mar.
"Tomotarou Ezaki,Akihiro Matsutani,Kunio Nishioka,Dai Shoji,Mina Sato,Takayuki Okamoto,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","Kelvin probe force microscopic images on gold nanodisks with and without light irradiation","The 2016 MRS Fall Meeting & Exhibit",,,,,,2016,
"Akihiro Matsutani,Mina Sato,Kunio Nishioka,Dai Shoji","EDX analysis of Si sidewall surface etched by deep-RIE process","28th International Microprocesses and Nanotechnology Conference (MNC2015)",,,"  12P-7-42",,,2015,Nov.
"Sachiko Matsushita,Akihiro Matsutani,Yasushi Morii,Daito Kobayashi,Kunio Nishioka,Dai Shoji,Mina Sato,Tetsu Tatsuma,Takumi Sannomiya,Toshihiro Isobe,Akira Nakajima","Calculation and Fabrication of Two-dimensional Complete Photonic Bandgap Structures composed of Rutile TiO2 Single Crystals in Air/Liquid",,"J. MATER. SCI.",,"Vol. 51","No. 2","pp. 1066-1073",2015,Sept.
"佐藤 美那,西岡國生,庄司大,松谷晃宏","Deep-RIEにより深掘りエッチングされたSiエッチング側面のEDX分析","第62回応用物理学会春季学術講演会",,,,,,2015,Mar.
"高橋 毅,松谷 晃宏,庄司 大,西岡 國生,佐藤 美那,磯部 敏宏,中島 章,松下 祥子","トップダウン・ボトムアップ統合アプローチによるポリスチレン四重極子の作製","応用物理学会春季学術講演会",,,,,,2015,Mar.
"岩崎 大和,西林 一彦,松谷 晃宏,佐藤 美那,久我 淳,宗片 比呂夫","光導波路とエバネッセント結合したGdFe薄膜の磁気光学応答","第62回応用物理学会春季学術講演会","予稿集",,,,"p. 04-033",2015,Mar.
"T. Takahashi,A. Matsutani,D. Shoji,K. Nishioka,M. Sato,T. Isobe,A. Nakajima,S. Matsushita","Microfabrication for a polystyrene quadrupole by template-assisted self-assembly",,"Colloid. Surf.A",,"Vol. 484","No. 5","pp. 75-80",2015,
"Akihiro Matsutani,Kunio Nishioka,Mina Sato,Dai Shoji,Daito Kobayashi,Toshihiro Isobe,Akira Nakajima,Tetsu Tatsuma,Sachiko Matsushita","Angled etching of (001) rutile Nb-TiO2 substrate using SF6-based capacitively coupled plasma reactive ion etching",,"Japanese Journal of Applied Physics",,"Vol. 53",,"p. 06JF02",2014,May
"佐藤 美那,松谷 晃宏,曽根 正人","多層膜構造を用いたEDX分析におけるCu中のX線発生領域の測定","第61回応用物理学会春季学術講演会",,,,,,2014,Mar.
"小林大斗,松谷晃宏,西岡國生,庄司 大,佐藤 美那,磯部敏宏,中島章,立間 徹,松下祥子","傾斜ドライエッチングを用いた酸化チタンフォトニック結晶の作製と評価","第61回 応用物理学会春季学術講演会",,,,,,2014,Mar.