"‘O“c K•½,Ό‰ͺš Ά,ƒ”ƒ@ƒ“ ƒjƒ…ƒnƒC,Ό’JWG,—§–Ψ —²,“ΰ“c ‹MŽi","Deep-RIE‚ΖXeF2‹C‘ŠƒGƒbƒ`ƒ“ƒO‚Ι‚ζ‚ιVOx/Si3N4/SiO2ƒƒ“ƒuƒŒƒ“‚̐»μ","‘ζ64‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο","‘ζ64‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰οu‰‰—\eW",,,,"  14p-317-3",2017,Mar.