"‘O“c�K•½,Van Nhu Hai,�¼‰ªš �¶,�¼’J�W�G,—§–Ø—²,“à“c‹MŽi","MOD –@‚É‚æ‚è Si3N4/SiO2ƒ�ƒ“ƒuƒŒƒ“�ã‚É�»�삵‚½VOxƒ}ƒCƒNƒ�ƒ{ƒ�ƒ��[ƒ^‚Ì“Á�«•]‰¿",,"“d‹CŠw‰ï˜_•¶Ž� A",,"Vol. 138","No. 9","pp. 471-477",2018,Sept.