"本田能之,永井伸治,森田昌幸,安藤正彦,松田晃史,吉本護","EUV光源コレクターミラー保護膜における表面劣化の抑制","第68回応用物理学会 春季学術講演会",,"応用物理学会",,,,2021,Feb.
"Yoshiyuki Honda,Tatsuya Yanagida,Yutaka Shiraishi,Masayuki Morita,Masahiko Andou,Hiroaki Tomuro,Akifumi Matsuda,Mamoru Yoshimoto","Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source",,"Applied Physics Express","IOP Publishing","Volume 13","Number 11",,2020,Oct.
"本田 能之,柳田 達哉,白石 裕,森田 昌幸,安藤 正彦,戸室 啓明,松田 晃史,吉本 護","EUV光源コレクターミラーの保護膜における劣化メカニズムの解明","第80回 応用物理学会 秋季学術講演会",,"応用物理学会",,,,2019,Sept.