"Yoshiyuki Honda,Tatsuya Yanagida,Yutaka Shiraishi,Masayuki Morita,Masahiko Andou,Hiroaki Tomuro,Akifumi Matsuda,Mamoru Yoshimoto","Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source",,"Applied Physics Express","IOP Publishing","Volume 13","Number 11",,2020,Oct.
"–{“c ”\”V,–ö“c ’B�Æ,”’�Î —T,�X“c �¹�K,ˆÀ“¡ �³•F,ŒËŽº Œ[–¾,�¼“c �WŽj,‹g–{ Œì","EUVŒõŒ¹ƒRƒŒƒNƒ^�[ƒ~ƒ‰�[‚̕ی얌‚É‚¨‚¯‚é—ò‰»ƒ�ƒJƒjƒYƒ€‚̉ð–¾","‘æ80‰ñ ‰ž—p•¨—�Šw‰ï �H‹GŠw�p�u‰‰‰ï",,"‰ž—p•¨—�Šw‰ï",,,,2019,Sept.