"C. Romeo,P. Cantu,D. Henry,H. Takekoshi,N. Hirayanagi,Kazuaki Suzuki,M. McCallum,H. Fujita,T. Takikawa,M. Hoga","Device based evaluation of electron projection lithography","SPIE Microlithography","Proceeding of SPIE",,"Vol. 5751",,"pp. 699-706",2005, "Kazuaki Suzuki,T. Fujiwara,S. Kojima,N. Hirayanagi,T. Yahiro,J. Udagawa,S. Shimizu,H. Yamamoto,M. Suzuki,H. Takekoshi,S. Fukui,M. Hamashima,J. Ikeda,T. Okino,H. Shimizu,S. Takahashi,A. Yamada,T. Umemoto,S. Katagiri,Y. Ohkubo,T. Shimoda,K. Hirose,T. Tanida,Y. Watanabe,T. Kaminaga,Y. Kohama,F. Mori,S. Takemoto,T. Yoshioka,H. Hirose,K. Morita,K. Hada,S. Kawata,T. Sato,Y. Sato,M. Tokunaga,K. Okamoto,Y. Kakizaki,T. Miura","First dynamic exposure results from an electron projection lithography tool",,"J. Vac. Sci. Technol. B","American Vacuum Society","Vol. 21","No. 6","pp. 2686-2690",2003,Dec.