"Kazuaki Suzuki,T. Fujiwara,K. Hada,N. Hirayanagi,S. Kawata,K. Morita,K. Okamoto,T. Okino,S Shimizu,T. Yahiro,H. Yamamoto","Nikon EB stepper: the latest development status","SPIE Microlithography","Proceeding of SPIE",,"Vol. 4343",,"pp. 80-87",2001,