"Kazuaki Suzuki,T. Fujiwara,K. Hada,N. Hirayanagi,S. Kawata,K. Morita,K. Okamoto,T. Okino,S. Shimizu,T. Yahiro","Nikon EB stepper: its system concept and countermeasure for critical issues","SPIE Microlithography","Proceeding of SPIE",,"Vol. 3997",,"pp. 214-224",2000,