"T. Okino,Kazuaki Suzuki,K. Okamoto,S. Kawata,K. Uchikawa,S. Suzuki,S. Shimizu,T. Fujiwara,A. Yamada,K. Kamijo","Investigation of proximy effect correction in electron projection lithography (EPL)","SPIE Microlithography","Proceeding of SPIE",,"Vol. 3997",,"pp. 235-244",2000,