"Kazuaki Suzuki,N. Hirayanagi,T. Fujiwara,A. Yamada,J. Ikeda,T. Yahiro,S. Kojima,J. Udagawa,H. Yamamoto,N. Katakura,M. Suzuki,T. Aoyama,H. Takekoshi,T. Umemoto,H. Shimizu,S. Fukui,S. Suzuki,T. Okino,Y. Ohkubo,T. Shimoda,T. Tanida,Y. Watanabe,Y. Kohama,K. Ohmori,F. Mori,S. Takemoto,T. Yoshioka,H. Hirose,K. Morita,K. Hada,S. Kawata,Y. Kakizaki,T. Miura","Full-field exposure performance of electron projection lithography tool",,"J. Vac. Sci. Technol. B","American Vacuum Society","Vol. 22","No. 6","pp. 2885-2890",2004,Dec.