"Vˆδ‹M‘ε,Β“c’q–η,αΑ•Η—E•v,’†“cŒ’,Œγ“‘‚Š°,‹{–{‹±K","N‹Ι«GaN HEMT‚ΜTMAH‚Ι‚ζ‚ι‘fŽq•ͺ—£","‘ζ69‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο",,,,,,2022,Mar. "T. Aota,A. Hayasaka,I. Makabe,S. Yoshida,T. Gotow,Y. Miyamoto","Wet etching for isolation of N-polar GaN HEMT structure by electrodeless photo-assisted electrochemical reaction",,"Japanese Journal of Applied Physics",," 60"," SCCF06",,2021,Mar. "Tomoya Aota,Akihiro Hayasaka,isao makabe,Shigeki Yoshida,Takahiro Gotow,YASUYUKI MIYAMOTO","Wet Etching for Isolation of N-polar GaN HEMT Structure by Electrodeless Photo-Assisted Electrochemical Reaction","33rd International Microprocesses and Nanotechnology Conference (MNC 2020)",,,,,,2020,Nov. "Β“c ’q–η,‘β –Ύ‘Χ,αΑ•Η —E•v,‹g“c ¬‹P,Œγ“‘ ‚Š°,‹{–{ ‹±K","N‹Ι«GaN HEMT\‘’‚Ε‚Μ–³“d‹ΙPECƒGƒbƒ`ƒ“ƒO","‘ζ81‰ρ ‰ž—p•¨—Šw‰οH‹GŠwpu‰‰‰ο",,,,,,2020,Sept.