"Masako Okumura,Tomoyuki Kurioka,Gen Hikosaka,Katsuyuki Machida,Tso-Fu Mark Chang,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Layer-Structure Effects on Warpage Behaviors of Proof-Masses with Ti/Au Multi-Layered Structures toward MEMS Capacitive Accelerometers","The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken)",,,,,,2026,Sept.
"‰œ‘Ί ‰λŽq,ŒI‰ͺ ’qs,ŽR“c ŒΥl,X ’B•F,Œόo η”Ή,Chen Chun-Yi,Chang Tso-Fu Mark,ŽO‘ξ ”ό”Ž,ˆΙ“‘ _”V,’¬“c Ž”V,‘]ͺ ³l","‰~Œ`‹ΰŽ1Ž²Γ“d—e—ΚŒ^MEMS‰Α‘¬“xƒZƒ“ƒT‚̍\‘’‚ΖƒfƒoƒCƒX“Α«•]‰Ώ","‘ζ73‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο","‘ζ73‰ρ‰ž—p•¨—Šw‰οt‹GŠwpu‰‰‰ο",,,,,2026,Mar.
"Masako Okumura,Tomoyuki Kurioka,Torauto Yamada,Tatsuhiko Mori,Katsuyuki Machida,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Single-axis gold micro-electro-mechanical-systems capacitive accelerometer with circular proof-mass for suppressing warpage",,"Japanese Journal of Applied Physics",,"Vol. 65","Number 5",,2026,Mar.